MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings
MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings
We have demonstrated two monolithically integrated Bragg grating based accelerometers, both with the optical path and mechanical structure being made from the same substrate. The unique fabrication techniques, Direct UV Writing and precision dicing, used to create the glass microcantilevers are discussed. We show experimental results from two different Bragg grating based interrogation systems, one utilizing a single Gaussian apodized Bragg grating and the other utilizes two spectrally matched Bragg gratings forming a Fabry-Pérot interferometer. Sinusoidal accelerations were applied to both devices and their sensitivities were found to be 0.67±0.035 mV/g and 14.0±0.44 mV/g for the single Bragg grating and Fabry-Pérot interferometer respectively.
Carpenter, Lewis
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Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
February 2013
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis, Holmes, C., Gates, J.C. and Smith, P.G.R.
(2013)
MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings.
SPIE Photonics West: Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII, San Francisco, United States.
04 - 05 Feb 2013.
(doi:10.1117/12.2004418).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We have demonstrated two monolithically integrated Bragg grating based accelerometers, both with the optical path and mechanical structure being made from the same substrate. The unique fabrication techniques, Direct UV Writing and precision dicing, used to create the glass microcantilevers are discussed. We show experimental results from two different Bragg grating based interrogation systems, one utilizing a single Gaussian apodized Bragg grating and the other utilizes two spectrally matched Bragg gratings forming a Fabry-Pérot interferometer. Sinusoidal accelerations were applied to both devices and their sensitivities were found to be 0.67±0.035 mV/g and 14.0±0.44 mV/g for the single Bragg grating and Fabry-Pérot interferometer respectively.
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Published date: February 2013
Venue - Dates:
SPIE Photonics West: Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII, San Francisco, United States, 2013-02-04 - 2013-02-05
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 360179
URI: http://eprints.soton.ac.uk/id/eprint/360179
PURE UUID: e0991316-908b-40c4-88c3-c46945c77b6d
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Date deposited: 28 Nov 2013 14:05
Last modified: 15 Mar 2024 03:27
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Contributors
Author:
Lewis Carpenter
Author:
J.C. Gates
Author:
P.G.R. Smith
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