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MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings

MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings
MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings
We have demonstrated two monolithically integrated Bragg grating based accelerometers, both with the optical path and mechanical structure being made from the same substrate. The unique fabrication techniques, Direct UV Writing and precision dicing, used to create the glass microcantilevers are discussed. We show experimental results from two different Bragg grating based interrogation systems, one utilizing a single Gaussian apodized Bragg grating and the other utilizes two spectrally matched Bragg gratings forming a Fabry-Pérot interferometer. Sinusoidal accelerations were applied to both devices and their sensitivities were found to be 0.67±0.035 mV/g and 14.0±0.44 mV/g for the single Bragg grating and Fabry-Pérot interferometer respectively.
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, Lewis, Holmes, C., Gates, J.C. and Smith, P.G.R. (2013) MEMS accelerometers utilizing resonant microcantilevers with interrogated single mode waveguides and Bragg gratings. SPIE Photonics West: Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII, United States. 04 - 05 Feb 2013. (doi:10.1117/12.2004418).

Record type: Conference or Workshop Item (Paper)

Abstract

We have demonstrated two monolithically integrated Bragg grating based accelerometers, both with the optical path and mechanical structure being made from the same substrate. The unique fabrication techniques, Direct UV Writing and precision dicing, used to create the glass microcantilevers are discussed. We show experimental results from two different Bragg grating based interrogation systems, one utilizing a single Gaussian apodized Bragg grating and the other utilizes two spectrally matched Bragg gratings forming a Fabry-Pérot interferometer. Sinusoidal accelerations were applied to both devices and their sensitivities were found to be 0.67±0.035 mV/g and 14.0±0.44 mV/g for the single Bragg grating and Fabry-Pérot interferometer respectively.

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More information

Published date: February 2013
Venue - Dates: SPIE Photonics West: Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII, United States, 2013-02-04 - 2013-02-05
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 360179
URI: https://eprints.soton.ac.uk/id/eprint/360179
PURE UUID: e0991316-908b-40c4-88c3-c46945c77b6d
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 28 Nov 2013 14:05
Last modified: 20 Jul 2019 01:06

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