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Fabrication and characterisation of a double-clamped beam structure as a control gate for a high-speed non-volatile memory device

Fabrication and characterisation of a double-clamped beam structure as a control gate for a high-speed non-volatile memory device
Fabrication and characterisation of a double-clamped beam structure as a control gate for a high-speed non-volatile memory device
We report the fabrication and characterisation of a suspended double-clamped beam structure that is implemented as a movable control gate within a hybrid high-speed non-volatile memory device. This structure features a foundation of SiO2/Si layers over which a poly-Si layer (sacrificial) is deposited by using a low-pressure chemical vapour deposition (LPCVD) and as a movable control gate, an aluminium (Al) layer is deposited by using an e-beam evaporator. The Al layer is patterned with double-clamped beam structures by using photolithography and through a combination of wet and dry etching processes, the structures are successfully suspended and characterised by using a C–V meter. From the structure characterisation, the pull-in curve is successfully obtained and due to unexpected large short-range forces such as the van der Waals forces, the pull-out curve is not observed. In order to clarify this issue, a numerical analysis is performed in which the structural materials under test shown the influence of such short-range forces on the structure and a solution to override them is proposed
0167-9317
22-25
Garcia Ramirez, Mario Alberto
56c4972d-5c77-40dd-8a48-5ffadae3259d
Ghiass, Mohammad Adel
ddf17d39-621b-44c6-bf39-2fa84e23b492
Moktadir, Z
9e14f4f9-7314-4a39-9776-473806c75dd4
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Garcia Ramirez, Mario Alberto
56c4972d-5c77-40dd-8a48-5ffadae3259d
Ghiass, Mohammad Adel
ddf17d39-621b-44c6-bf39-2fa84e23b492
Moktadir, Z
9e14f4f9-7314-4a39-9776-473806c75dd4
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9

Garcia Ramirez, Mario Alberto, Ghiass, Mohammad Adel, Moktadir, Z, Tsuchiya, Yoshishige and Mizuta, Hiroshi (2014) Fabrication and characterisation of a double-clamped beam structure as a control gate for a high-speed non-volatile memory device. Microelectronic Engineering, 114, 22-25. (doi:10.1016/j.mee.2013.09.002).

Record type: Article

Abstract

We report the fabrication and characterisation of a suspended double-clamped beam structure that is implemented as a movable control gate within a hybrid high-speed non-volatile memory device. This structure features a foundation of SiO2/Si layers over which a poly-Si layer (sacrificial) is deposited by using a low-pressure chemical vapour deposition (LPCVD) and as a movable control gate, an aluminium (Al) layer is deposited by using an e-beam evaporator. The Al layer is patterned with double-clamped beam structures by using photolithography and through a combination of wet and dry etching processes, the structures are successfully suspended and characterised by using a C–V meter. From the structure characterisation, the pull-in curve is successfully obtained and due to unexpected large short-range forces such as the van der Waals forces, the pull-out curve is not observed. In order to clarify this issue, a numerical analysis is performed in which the structural materials under test shown the influence of such short-range forces on the structure and a solution to override them is proposed

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More information

Accepted/In Press date: 3 September 2013
e-pub ahead of print date: 13 September 2013
Published date: February 2014
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 361471
URI: http://eprints.soton.ac.uk/id/eprint/361471
ISSN: 0167-9317
PURE UUID: 9fd2e173-7838-4fa3-aab6-e2c6cb54f69c

Catalogue record

Date deposited: 23 Jan 2014 13:57
Last modified: 09 Nov 2021 00:56

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Contributors

Author: Mario Alberto Garcia Ramirez
Author: Mohammad Adel Ghiass
Author: Z Moktadir
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta

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