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Development of a MEMS test platform for investigating the use of multi-walled CNT composites electric contacts

Development of a MEMS test platform for investigating the use of multi-walled CNT composites electric contacts
Development of a MEMS test platform for investigating the use of multi-walled CNT composites electric contacts
The use of gold-coated multi-walled carbon nanotube (Au/MWCNT) composites have been shown to extend the life of electrical contacts, in previous work [1-3]. Due to the long lifetimes (which are of the order of 106 up to 108 cycles [4, 5]) the lifetime testing tends to be highly time consuming. In this work we discuss the design and development of an electrostatically actuated MEMS cantilever beam which enables testing at higher frequencies than our previous experimental rig. Following calculations using fundamental cantilever beam equations, a computational model of the designed beam was developed to accurately predict the characteristics of the beam, including the resonant frequency, pull-in voltage and contact force. Where possible the values from the model have been compared with the fabricated MEMS cantilever beam. A MEMS-based electrostatically actuated cantilever beam has been fabricated and incorporated with Au/MWCNT composite surfaces to form a MEMS switch test platform. Initial results show the improved performance over a PZT based test platform.
978-1-4799-2834-7
472-478
Lewis, Adam P.
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Chianrabutra, Chamaporn
f09c1da6-370e-43ac-b9bb-5283633ebadb
Jiang, Liudi
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Pu, Suan-Hui
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McBride, John W.
d9429c29-9361-4747-9ba3-376297cb8770
Lewis, Adam P.
4c3eefcd-e5c3-46be-9004-91fd706ec385
Chianrabutra, Chamaporn
f09c1da6-370e-43ac-b9bb-5283633ebadb
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
McBride, John W.
d9429c29-9361-4747-9ba3-376297cb8770

Lewis, Adam P., Chianrabutra, Chamaporn, Jiang, Liudi, Pu, Suan-Hui and McBride, John W. (2014) Development of a MEMS test platform for investigating the use of multi-walled CNT composites electric contacts. 15th Electronics Packaging Technology Conference (EPTC 2013), Singapore, Singapore. 11 - 13 Dec 2013. pp. 472-478 . (doi:10.1109/EPTC.2013.6745765).

Record type: Conference or Workshop Item (Paper)

Abstract

The use of gold-coated multi-walled carbon nanotube (Au/MWCNT) composites have been shown to extend the life of electrical contacts, in previous work [1-3]. Due to the long lifetimes (which are of the order of 106 up to 108 cycles [4, 5]) the lifetime testing tends to be highly time consuming. In this work we discuss the design and development of an electrostatically actuated MEMS cantilever beam which enables testing at higher frequencies than our previous experimental rig. Following calculations using fundamental cantilever beam equations, a computational model of the designed beam was developed to accurately predict the characteristics of the beam, including the resonant frequency, pull-in voltage and contact force. Where possible the values from the model have been compared with the fabricated MEMS cantilever beam. A MEMS-based electrostatically actuated cantilever beam has been fabricated and incorporated with Au/MWCNT composite surfaces to form a MEMS switch test platform. Initial results show the improved performance over a PZT based test platform.

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More information

e-pub ahead of print date: December 2013
Published date: 20 February 2014
Additional Information: Funded by EPSRC: An Innovatative Eletronics Manufacturing Research Centre (EP/H03014X/1)
Venue - Dates: 15th Electronics Packaging Technology Conference (EPTC 2013), Singapore, Singapore, 2013-12-11 - 2013-12-13
Organisations: Mechatronics, Engineering Science Unit

Identifiers

Local EPrints ID: 362606
URI: http://eprints.soton.ac.uk/id/eprint/362606
ISBN: 978-1-4799-2834-7
PURE UUID: 2f20677f-b983-432e-8f16-f201a39eba1d
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 27 Feb 2014 13:37
Last modified: 21 Nov 2021 03:26

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Contributors

Author: Adam P. Lewis
Author: Chamaporn Chianrabutra
Author: Liudi Jiang ORCID iD
Author: Suan-Hui Pu ORCID iD
Author: John W. McBride

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