Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
A silica micro-cantilever with intrinsically defined planar Bragg gratings has been fabricated using a combination of direct UV writing and micromachining, in a silica-on-silicon platform. Through optically monitoring the response of the Bragg gratings, defined within the cantilever, induced stresses can be measured. The fabricated silica cantilever is 65µm wide, 40µm thick and 3mm in length. It contains three planar Bragg gratings and can attain ~60nm deflection resolution.
Holmes, C.
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Carpenter, Lewis
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Rogers, Helen
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Gates, J.C.
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Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C., Carpenter, Lewis, Rogers, Helen, Gates, J.C. and Smith, P.G.R.
(2010)
Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining.
11th International Symposium on Laser Precision Microfabrication, Stuttgart, Germany.
07 - 11 Jun 2010.
5 pp
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
A silica micro-cantilever with intrinsically defined planar Bragg gratings has been fabricated using a combination of direct UV writing and micromachining, in a silica-on-silicon platform. Through optically monitoring the response of the Bragg gratings, defined within the cantilever, induced stresses can be measured. The fabricated silica cantilever is 65µm wide, 40µm thick and 3mm in length. It contains three planar Bragg gratings and can attain ~60nm deflection resolution.
More information
e-pub ahead of print date: 2010
Venue - Dates:
11th International Symposium on Laser Precision Microfabrication, Stuttgart, Germany, 2010-06-07 - 2010-06-11
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 362781
URI: https://eprints.soton.ac.uk/id/eprint/362781
PURE UUID: 9eeb5911-5f71-42f9-927c-75723305df4f
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Date deposited: 12 Mar 2014 11:26
Last modified: 17 Oct 2019 00:38
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Contributors
Author:
Helen Rogers
University divisions
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