Holmes, C., Carpenter, Lewis, Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2010) Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining. 11th International Symposium on Laser Precision Microfabrication, Stuttgart, Germany. 07 - 11 Jun 2010. 5 pp .
Abstract
A silica micro-cantilever with intrinsically defined planar Bragg gratings has been fabricated using a combination of direct UV writing and micromachining, in a silica-on-silicon platform. Through optically monitoring the response of the Bragg gratings, defined within the cantilever, induced stresses can be measured. The fabricated silica cantilever is 65µm wide, 40µm thick and 3mm in length. It contains three planar Bragg gratings and can attain ~60nm deflection resolution.
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- Faculties (pre 2018 reorg) > Faculty of Engineering and the Environment (pre 2018 reorg) > Southampton Marine & Maritime Institute (pre 2018 reorg)
- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
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