The University of Southampton
University of Southampton Institutional Repository

Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining

Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining
A silica micro-cantilever with intrinsically defined planar Bragg gratings has been fabricated using a combination of direct UV writing and micromachining, in a silica-on-silicon platform. Through optically monitoring the response of the Bragg gratings, defined within the cantilever, induced stresses can be measured. The fabricated silica cantilever is 65µm wide, 40µm thick and 3mm in length. It contains three planar Bragg gratings and can attain ~60nm deflection resolution.
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, C., Carpenter, Lewis, Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2010) Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining. 11th International Symposium on Laser Precision Microfabrication, Stuttgart, Germany. 07 - 11 Jun 2010. 5 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

A silica micro-cantilever with intrinsically defined planar Bragg gratings has been fabricated using a combination of direct UV writing and micromachining, in a silica-on-silicon platform. Through optically monitoring the response of the Bragg gratings, defined within the cantilever, induced stresses can be measured. The fabricated silica cantilever is 65µm wide, 40µm thick and 3mm in length. It contains three planar Bragg gratings and can attain ~60nm deflection resolution.

Text
4871.pdf - Other
Download (876kB)

More information

e-pub ahead of print date: 2010
Venue - Dates: 11th International Symposium on Laser Precision Microfabrication, Stuttgart, Germany, 2010-06-07 - 2010-06-11
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 362781
URI: https://eprints.soton.ac.uk/id/eprint/362781
PURE UUID: 9eeb5911-5f71-42f9-927c-75723305df4f
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 12 Mar 2014 11:26
Last modified: 26 Feb 2019 01:34

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×