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Integrated optical glass microcantilevers for displacement and pressure sensing

Integrated optical glass microcantilevers for displacement and pressure sensing
Integrated optical glass microcantilevers for displacement and pressure sensing
A new way to create microcantilevers in glass allows integration of optical waveguides and Bragg gratings. The optical structures are created simultaneously by direct grating writing, followed by high precision dicing and then wet etching to release the glass microcantilevers. Bragg grating interrogation together with piezo-actuation allows the mechanical resonances to be probed, and displacement sensed with an interaction range of 20nm. By varying the pressure of the surrounding air we see a characteristic transition in the mechanical damping from the viscous to the molecular flow regime.
Carpenter, Lewis
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Holmes, C.
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Rogers, Helen
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Gates, J.C.
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Smith, P.G.R.
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Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Carpenter, Lewis, Holmes, C., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2010) Integrated optical glass microcantilevers for displacement and pressure sensing. International OSA Network of Students IONS-8, Moscow, Russian Federation. 21 - 25 Jun 2010. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

A new way to create microcantilevers in glass allows integration of optical waveguides and Bragg gratings. The optical structures are created simultaneously by direct grating writing, followed by high precision dicing and then wet etching to release the glass microcantilevers. Bragg grating interrogation together with piezo-actuation allows the mechanical resonances to be probed, and displacement sensed with an interaction range of 20nm. By varying the pressure of the surrounding air we see a characteristic transition in the mechanical damping from the viscous to the molecular flow regime.

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More information

Published date: 2010
Venue - Dates: International OSA Network of Students IONS-8, Moscow, Russian Federation, 2010-06-21 - 2010-06-25
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 362783
URI: https://eprints.soton.ac.uk/id/eprint/362783
PURE UUID: f8790b0f-2ff6-44a5-911a-2d35259c493f
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 10 Mar 2014 11:26
Last modified: 06 Oct 2018 00:37

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