The University of Southampton
University of Southampton Institutional Repository

Rapid laser-based micro/nano-manufacturing using digital multimirror device technology

Rapid laser-based micro/nano-manufacturing using digital multimirror device technology
Rapid laser-based micro/nano-manufacturing using digital multimirror device technology
Single pulses from an ultrafast laser, in combination with a Texas Instrument’s digital multimirror device, have been used to spatially pattern complex structures via laser-ablation, with sub-micron-scale resolution. This flexible and novel manufacturing technique has the ability to pattern (via additive and subtractive fabrication) up to ~1cm2 regions with sub-micron resolution on the time scale of hours, hence finding applications in fields as diverse as metamaterials, telecommunications and semiconductor technologies.
There exists a wide range of techniques for the fabrication of micro-scale complex structures, including electron beam lithography, focused-ion beam milling, and direct laser. Whilst these techniques undoubtedly provide impressive resolution, these approaches are not so useful for the manufacturing of larger-scale (~1mm to 1cm) devices, due to the significant time scales that are generally required.
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, Matthias
3b15dc5b-ff52-4232-9632-b1be238a750c
Gholipour, B.
c17bd62d-9df6-40e6-bc42-65272d97e559
Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, Matthias
3b15dc5b-ff52-4232-9632-b1be238a750c
Gholipour, B.
c17bd62d-9df6-40e6-bc42-65272d97e559
Grant-Jacob, James
c5d144d8-3c43-4195-8e80-edd96bfda91b
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Mills, B., Feinäugle, Matthias, Gholipour, B., Grant-Jacob, James and Eason, R.W. (2013) Rapid laser-based micro/nano-manufacturing using digital multimirror device technology. UKMTFC 2013 (2nd Annual EPSRC Manufacturing the Future Conference), Cranfield, United Kingdom. 16 - 17 Sep 2013.

Record type: Conference or Workshop Item (Paper)

Abstract

Single pulses from an ultrafast laser, in combination with a Texas Instrument’s digital multimirror device, have been used to spatially pattern complex structures via laser-ablation, with sub-micron-scale resolution. This flexible and novel manufacturing technique has the ability to pattern (via additive and subtractive fabrication) up to ~1cm2 regions with sub-micron resolution on the time scale of hours, hence finding applications in fields as diverse as metamaterials, telecommunications and semiconductor technologies.
There exists a wide range of techniques for the fabrication of micro-scale complex structures, including electron beam lithography, focused-ion beam milling, and direct laser. Whilst these techniques undoubtedly provide impressive resolution, these approaches are not so useful for the manufacturing of larger-scale (~1mm to 1cm) devices, due to the significant time scales that are generally required.

Full text not available from this repository.

More information

e-pub ahead of print date: 2013
Venue - Dates: UKMTFC 2013 (2nd Annual EPSRC Manufacturing the Future Conference), Cranfield, United Kingdom, 2013-09-16 - 2013-09-17
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 365187
URI: http://eprints.soton.ac.uk/id/eprint/365187
PURE UUID: f1d89fb8-79c9-4994-bcc8-45fc05fc316d
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for James Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 27 May 2014 13:06
Last modified: 18 Feb 2021 17:15

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×