Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device
Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device
In this work a Quasi-Concertina (QC) spring capable of a high linear range, large deflections, high out-of-plane compliance, and low in-plane compliance for MEMS applications is presented. These features are essential for high accuracy out-of-plane measurements such as those required in self-sensing nanoindentation atomic force microscopy (AFM) probes or molecular mass sensors. The spring constant and first mode resonant frequency of the spring was determined analytically and verified numerically. The QC springs were microfabricated using a purposely developed stiction free process. Force–displacement tests on the QC springs have shown them to be in good agreement with the analytical and finite element analysis performed. The measurement results show that the QC springs fabricated have an out-of-plane spring constant of 5.5 N/m, 0.129 N/m, and 0.156 N/m, remain 99% linear to a deflection of 100 ?m, 1080 ?m, and 931 ?m respectively, and can have a total deflection before fracture of as much as 8000 ?m.
MEMS, spring, flexure, AFM, force–displacement, quasi-concertina
75-78
Grech, David
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Kiang, Kian S.
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Zekonyte, Jurgita
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Stolz, Martin
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Wood, Robert J.K.
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Chong, Harold M.H.
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1 May 2014
Grech, David
f44a3fe2-5f50-4192-9018-3fccd1612ceb
Kiang, Kian S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Zekonyte, Jurgita
c40df725-5ce3-4692-b638-bbb4d847b5ea
Stolz, Martin
7bfa1d59-511d-471b-96ce-679b343b5d1d
Wood, Robert J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Grech, David, Kiang, Kian S., Zekonyte, Jurgita, Stolz, Martin, Wood, Robert J.K. and Chong, Harold M.H.
(2014)
Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device.
[in special issue: Micro/Nano Devices and Systems 2013]
Microelectronic Engineering, 119, .
(doi:10.1016/j.mee.2014.02.016).
Abstract
In this work a Quasi-Concertina (QC) spring capable of a high linear range, large deflections, high out-of-plane compliance, and low in-plane compliance for MEMS applications is presented. These features are essential for high accuracy out-of-plane measurements such as those required in self-sensing nanoindentation atomic force microscopy (AFM) probes or molecular mass sensors. The spring constant and first mode resonant frequency of the spring was determined analytically and verified numerically. The QC springs were microfabricated using a purposely developed stiction free process. Force–displacement tests on the QC springs have shown them to be in good agreement with the analytical and finite element analysis performed. The measurement results show that the QC springs fabricated have an out-of-plane spring constant of 5.5 N/m, 0.129 N/m, and 0.156 N/m, remain 99% linear to a deflection of 100 ?m, 1080 ?m, and 931 ?m respectively, and can have a total deflection before fracture of as much as 8000 ?m.
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e-pub ahead of print date: 2 March 2014
Published date: 1 May 2014
Keywords:
MEMS, spring, flexure, AFM, force–displacement, quasi-concertina
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 366353
URI: http://eprints.soton.ac.uk/id/eprint/366353
ISSN: 0167-9317
PURE UUID: e0851418-8a27-4c64-8b44-b3d8d74c3483
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Date deposited: 25 Jun 2014 10:45
Last modified: 15 Mar 2024 03:35
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Author:
David Grech
Author:
Jurgita Zekonyte
Author:
Harold M.H. Chong
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