The University of Southampton
×
Filter your search:
University of Southampton Institutional Repository

A novel top-down fabrication process for Ge2Sb2Te5 phase change material nanowires

A novel top-down fabrication process for Ge2Sb2Te5 phase change material nanowires
A novel top-down fabrication process for Ge2Sb2Te5 phase change material nanowires
A novel e-beam free, top-down spacer etch process was used to fabricate sub-hundred nanometer Ge2Sb2Te5 phase change nanowires. Naowires with a cross-section dimension of 50 nm × 100 nm (width × height) were obtained and phase change functionality demonstrated.
978-1-4799-4110-0
2-5
Huang, Ruomeng
c6187811-ef2f-4437-8333-595c0d6ac978
Sun, Kai
2ace53c1-82cc-47e5-911e-898b143163d3
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Chen, Ruiqi
2198083c-19b4-40dd-a28e-5929b80577c5
Wang, Yudong
c48bcc7c-4cb4-468c-af4e-d1e601222009
Gholipour, Behrad
c17bd62d-9df6-40e6-bc42-65272d97e559
Hewak, Daniel W.
87c80070-c101-4f7a-914f-4cc3131e3db0
Hector, Andrew L.
f19a8f31-b37f-4474-b32a-b7cf05b9f0e5
Reid, Gillian
37d35b11-40ce-48c5-a68e-f6ce04cd4037
de Groot, C.H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Huang, Ruomeng
c6187811-ef2f-4437-8333-595c0d6ac978
Sun, Kai
2ace53c1-82cc-47e5-911e-898b143163d3
Kiang, Kian Shen
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Chen, Ruiqi
2198083c-19b4-40dd-a28e-5929b80577c5
Wang, Yudong
c48bcc7c-4cb4-468c-af4e-d1e601222009
Gholipour, Behrad
c17bd62d-9df6-40e6-bc42-65272d97e559
Hewak, Daniel W.
87c80070-c101-4f7a-914f-4cc3131e3db0
Hector, Andrew L.
f19a8f31-b37f-4474-b32a-b7cf05b9f0e5
Reid, Gillian
37d35b11-40ce-48c5-a68e-f6ce04cd4037
de Groot, C.H.
92cd2e02-fcc4-43da-8816-c86f966be90c

Huang, Ruomeng, Sun, Kai, Kiang, Kian Shen, Chen, Ruiqi, Wang, Yudong, Gholipour, Behrad, Hewak, Daniel W., Hector, Andrew L., Reid, Gillian and de Groot, C.H. (2013) A novel top-down fabrication process for Ge2Sb2Te5 phase change material nanowires. 13th Non-Volatile Memory Technology Symposium (NVMTS), Minneapolis, United States. 12 - 14 Aug 2013. pp. 2-5 . (doi:10.1109/NVMTS.2013.6851047).

Record type: Conference or Workshop Item (Paper)

Abstract

A novel e-beam free, top-down spacer etch process was used to fabricate sub-hundred nanometer Ge2Sb2Te5 phase change nanowires. Naowires with a cross-section dimension of 50 nm × 100 nm (width × height) were obtained and phase change functionality demonstrated.

Other
Huang2013-A novel top-down fabrication process for Ge2Sb2Te5 phase change material nanowires.PDF - Accepted Manuscript
Download (622kB)

More information

Published date: August 2013
Venue - Dates: 13th Non-Volatile Memory Technology Symposium (NVMTS), Minneapolis, United States, 2013-08-12 - 2013-08-14
Organisations: Optoelectronics Research Centre, Nanoelectronics and Nanotechnology, Electrochemistry, FIMS
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 367237
URI: http://eprints.soton.ac.uk/id/eprint/367237
DOI: doi:10.1109/NVMTS.2013.6851047
ISBN: 978-1-4799-4110-0
PURE UUID: deb84380-9466-4d35-87d4-0af0ea29533d
ORCID for Ruomeng Huang: ORCID iD orcid.org/0000-0003-1185-635X
ORCID for Kian Shen Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for Daniel W. Hewak: ORCID iD orcid.org/0000-0002-2093-5773
ORCID for Andrew L. Hector: ORCID iD orcid.org/0000-0002-9964-2163
ORCID for Gillian Reid: ORCID iD orcid.org/0000-0001-5349-3468
ORCID for C.H. de Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 24 Jul 2014 15:12
Last modified: 15 Mar 2024 03:42

Export record

Altmetrics

Contributors

Author: Ruomeng Huang ORCID iD
Author: Kai Sun
Author: Kian Shen Kiang ORCID iD
Author: Ruiqi Chen
Author: Yudong Wang
Author: Behrad Gholipour
Author: Daniel W. Hewak ORCID iD
Author: Andrew L. Hector ORCID iD
Author: Gillian Reid ORCID iD
Author: C.H. de Groot ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information
Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×