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Femtosecond ablation using an intensity spatial light modulator: what is the minimum machinable feature size?

Femtosecond ablation using an intensity spatial light modulator: what is the minimum machinable feature size?
Femtosecond ablation using an intensity spatial light modulator: what is the minimum machinable feature size?
Advances in digital multimirror devices (DMDs), which consist of arrays of micron-sized mirrors that are individually switchable, have recently led to their use in a variety of applications in optics and laser science. Here, a DMD is used as an intensity spatial light modulator for 800nm, 1mJ, 150fs pulses, at a 1kHz repetition rate, for high-resolution subtractive machining of thin films. The use of a high-energy laser pulse enables an entire complex pattern, with approximately 1000 by 1000 pixel resolution, to be ablated in a thin film by a single ultrashort pulse.We continue the progress of [1] by reducing the minimum feature size from ~400nm down to <200nm, through careful management of the multiphoton processes, to controllably create connecting structures. Initial results show designed features that are thinner than one-tenth of the laser wavelength. We show that the ability to pattern unique structures for each individual laser pulse enables the patterning of large areas of contiguous complex structures (1mm-squared per hour), with sub-wavelength feature sizes. We will also present recent experimental results on the application of this technique to the rapid parallel processing of bulk materials, including diamond.
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Heath, D.J.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Grant-Jacob, J.A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Feinäugle, M.
3b15dc5b-ff52-4232-9632-b1be238a750c
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Heath, D.J.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Grant-Jacob, J.A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Feinäugle, M.
3b15dc5b-ff52-4232-9632-b1be238a750c
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Mills, B., Heath, D.J., Grant-Jacob, J.A., Feinäugle, M. and Eason, R.W. (2014) Femtosecond ablation using an intensity spatial light modulator: what is the minimum machinable feature size? Materials Research Society Spring Meeting E-MRS '14. 26 - 30 May 2014.

Record type: Conference or Workshop Item (Paper)

Abstract

Advances in digital multimirror devices (DMDs), which consist of arrays of micron-sized mirrors that are individually switchable, have recently led to their use in a variety of applications in optics and laser science. Here, a DMD is used as an intensity spatial light modulator for 800nm, 1mJ, 150fs pulses, at a 1kHz repetition rate, for high-resolution subtractive machining of thin films. The use of a high-energy laser pulse enables an entire complex pattern, with approximately 1000 by 1000 pixel resolution, to be ablated in a thin film by a single ultrashort pulse.We continue the progress of [1] by reducing the minimum feature size from ~400nm down to <200nm, through careful management of the multiphoton processes, to controllably create connecting structures. Initial results show designed features that are thinner than one-tenth of the laser wavelength. We show that the ability to pattern unique structures for each individual laser pulse enables the patterning of large areas of contiguous complex structures (1mm-squared per hour), with sub-wavelength feature sizes. We will also present recent experimental results on the application of this technique to the rapid parallel processing of bulk materials, including diamond.

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More information

Published date: 2014
Venue - Dates: Materials Research Society Spring Meeting E-MRS '14, 2014-05-26 - 2014-05-30
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 367787
URI: http://eprints.soton.ac.uk/id/eprint/367787
PURE UUID: d07ace61-2540-47a5-9809-ed22b8f1b1f8
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for J.A. Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 15 Sep 2014 08:43
Last modified: 18 Feb 2021 17:15

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