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Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology

Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology
Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology
Fabrication of periodic nanodot or nanocolumn arrays on surfaces is performed by top-down lithographic procedures or bottom-up self-assembly methods, which both make use of plasma etching to transfer the periodic pattern. Could plasma etching alone act as an assembly–organization method to create the pattern and then transfer it to the substrate? We present data that support this idea and propose a mechanism of periodicity formation where etching and simultaneous deposition take place.
0957-4484
085302-[8pp]
Vourdas, N.
10d8cfb5-6665-4a65-8b36-d9df0929a425
Kontziampasis, D.
0bffea5c-c766-4f82-b153-e5c00ac3df33
Kokkoris, G.
5f8b4ea0-e3d8-4393-8d0b-4ef142bfd288
Constantoudis, V.
aadaf488-cc95-4881-9254-5537045b36e7
Goodyear, A.
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Tserepi, A.
c981f8c0-3be1-4c02-b765-9a55582d6752
Cooke, M.
aa3780dd-f695-4998-9fda-44e3bb4b5d4a
Gogolides, E.
3d1c5569-8ab3-4708-b7ff-df91d299658e
Vourdas, N.
10d8cfb5-6665-4a65-8b36-d9df0929a425
Kontziampasis, D.
0bffea5c-c766-4f82-b153-e5c00ac3df33
Kokkoris, G.
5f8b4ea0-e3d8-4393-8d0b-4ef142bfd288
Constantoudis, V.
aadaf488-cc95-4881-9254-5537045b36e7
Goodyear, A.
7d93ec10-94b8-40bd-ab7f-30a3bf5817f4
Tserepi, A.
c981f8c0-3be1-4c02-b765-9a55582d6752
Cooke, M.
aa3780dd-f695-4998-9fda-44e3bb4b5d4a
Gogolides, E.
3d1c5569-8ab3-4708-b7ff-df91d299658e

Vourdas, N., Kontziampasis, D., Kokkoris, G., Constantoudis, V., Goodyear, A., Tserepi, A., Cooke, M. and Gogolides, E. (2010) Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology. Nanotechnology, 21 (8), 085302-[8pp]. (doi:10.1088/0957-4484/21/8/085302).

Record type: Article

Abstract

Fabrication of periodic nanodot or nanocolumn arrays on surfaces is performed by top-down lithographic procedures or bottom-up self-assembly methods, which both make use of plasma etching to transfer the periodic pattern. Could plasma etching alone act as an assembly–organization method to create the pattern and then transfer it to the substrate? We present data that support this idea and propose a mechanism of periodicity formation where etching and simultaneous deposition take place.

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More information

Published date: 25 January 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 368023
URI: http://eprints.soton.ac.uk/id/eprint/368023
ISSN: 0957-4484
PURE UUID: d980b0dd-f7ab-4073-b423-9cf514c72c20

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Date deposited: 09 Sep 2014 13:50
Last modified: 15 Jul 2019 21:47

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Contributors

Author: N. Vourdas
Author: D. Kontziampasis
Author: G. Kokkoris
Author: V. Constantoudis
Author: A. Goodyear
Author: A. Tserepi
Author: M. Cooke
Author: E. Gogolides

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