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Design and fabrication of InP free-standing optical waveguides for MEMS

Design and fabrication of InP free-standing optical waveguides for MEMS
Design and fabrication of InP free-standing optical waveguides for MEMS
We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation functionality to the waveguides. The device is designed to be used as an optical buffer for telecommunication applications.
Ng, W.H.
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Podoliak, N.
0908b951-00a7-48a5-bc82-631640910b9c
Stewart, W.J.
840abb03-d8d7-4fba-9e3e-86c70a310910
Horak, P.
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Liu, H.
c9560e2b-c593-4209-8578-39bd481ee456
Kenyon, A.J.
e2e3bbbc-23b6-4c67-832d-9a16abf4aa31
Ng, W.H.
8d085a91-7054-4571-986b-4d6723f901ea
Podoliak, N.
0908b951-00a7-48a5-bc82-631640910b9c
Stewart, W.J.
840abb03-d8d7-4fba-9e3e-86c70a310910
Horak, P.
520489b5-ccc7-4d29-bb30-c1e36436ea03
Liu, H.
c9560e2b-c593-4209-8578-39bd481ee456
Kenyon, A.J.
e2e3bbbc-23b6-4c67-832d-9a16abf4aa31

Ng, W.H., Podoliak, N., Stewart, W.J., Horak, P., Liu, H. and Kenyon, A.J. (2014) Design and fabrication of InP free-standing optical waveguides for MEMS. International Conference on Optical MEMS and Nanophotonics (OMN2014), , Glasgow, United Kingdom. 17 - 21 Aug 2014.

Record type: Conference or Workshop Item (Poster)

Abstract

We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation functionality to the waveguides. The device is designed to be used as an optical buffer for telecommunication applications.

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More information

Published date: 2014
Additional Information: WA-P43
Venue - Dates: International Conference on Optical MEMS and Nanophotonics (OMN2014), , Glasgow, United Kingdom, 2014-08-17 - 2014-08-21
Organisations: Optoelectronics Research Centre, Quantum, Light & Matter Group
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 368103
URI: http://eprints.soton.ac.uk/id/eprint/368103
PURE UUID: 9d4e3ec0-7b3e-4ceb-afca-5ab1075af126
ORCID for N. Podoliak: ORCID iD orcid.org/0000-0002-3146-0355
ORCID for P. Horak: ORCID iD orcid.org/0000-0002-8710-8764

Catalogue record

Date deposited: 12 Sep 2014 13:51
Last modified: 15 Mar 2024 03:36

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Contributors

Author: W.H. Ng
Author: N. Podoliak ORCID iD
Author: W.J. Stewart
Author: P. Horak ORCID iD
Author: H. Liu
Author: A.J. Kenyon

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