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Printing of continuous copper lines using LIFT with donor replenishment

Printing of continuous copper lines using LIFT with donor replenishment
Printing of continuous copper lines using LIFT with donor replenishment
Metallic deposition is important for an array of scientific and technological applications. Standard deposition techniques include sputtering, evaporation and chemical vapour deposition (CVD) [1], however, these all lack the ability to achieve spatial patterning without subsequent processing steps. Methods such as e-beam lithography and focused ion beam milling can be used for surface patterning of metals and other materials [2], but they generally require vacuum conditions and can therefore be very time consuming, or for some applications, prohibitively long. Here, we report on the direct deposition of copper using laser-induced forward transfer (LIFT) [3], a technique that uses ultrashort laser pulses to transfer material from a thin-film donor to a receiver substrate, in combination with a novel donor replenishment scheme. We demonstrate the printing of sub-millimetre long copper lines that are a few microns wide and sub-micron in height. The resistivity of the copper lines measured so far is a factor of 10 higher than that of bulk copper, but we will report our most recent results on reduction of printed line resistance through LIFT process parameter optimization.
Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, M.
3b15dc5b-ff52-4232-9632-b1be238a750c
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Oosterhuis, G.
44c30fd8-d13d-4b90-9872-ba429c2ca743
Hoppenbrouwers, M.B.
7b6aa75a-ce25-486d-9b17-3e1ea35430f8
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, M.
3b15dc5b-ff52-4232-9632-b1be238a750c
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Oosterhuis, G.
44c30fd8-d13d-4b90-9872-ba429c2ca743
Hoppenbrouwers, M.B.
7b6aa75a-ce25-486d-9b17-3e1ea35430f8
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Grant-Jacob, J., Mills, B., Feinäugle, M., Sones, C.L., Oosterhuis, G., Hoppenbrouwers, M.B. and Eason, R.W. (2013) Printing of continuous copper lines using LIFT with donor replenishment. E-MRS '13 Materials Research Society Spring Meeting, France. 27 - 31 May 2013.

Record type: Conference or Workshop Item (Paper)

Abstract

Metallic deposition is important for an array of scientific and technological applications. Standard deposition techniques include sputtering, evaporation and chemical vapour deposition (CVD) [1], however, these all lack the ability to achieve spatial patterning without subsequent processing steps. Methods such as e-beam lithography and focused ion beam milling can be used for surface patterning of metals and other materials [2], but they generally require vacuum conditions and can therefore be very time consuming, or for some applications, prohibitively long. Here, we report on the direct deposition of copper using laser-induced forward transfer (LIFT) [3], a technique that uses ultrashort laser pulses to transfer material from a thin-film donor to a receiver substrate, in combination with a novel donor replenishment scheme. We demonstrate the printing of sub-millimetre long copper lines that are a few microns wide and sub-micron in height. The resistivity of the copper lines measured so far is a factor of 10 higher than that of bulk copper, but we will report our most recent results on reduction of printed line resistance through LIFT process parameter optimization.

Full text not available from this repository.

More information

Published date: May 2013
Venue - Dates: E-MRS '13 Materials Research Society Spring Meeting, France, 2013-05-27 - 2013-05-31
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 368243
URI: http://eprints.soton.ac.uk/id/eprint/368243
PURE UUID: b1ea301d-a48e-4221-bc20-f3e3e370b0d5
ORCID for J. Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 17 Sep 2014 14:00
Last modified: 18 Feb 2021 17:15

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