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Laser ablation via programmable image projection for submicron dimension machining in diamond

Laser ablation via programmable image projection for submicron dimension machining in diamond
Laser ablation via programmable image projection for submicron dimension machining in diamond
A digital micromirror device is used as an intensity spatial light modulator, in conjunction with a femtosecond laser, for programmable image-projection-based laser ablation of polycrystalline diamond. Results show the machining of complex structures on the diamond surface, where individual structures have submicron features, covering a total area of 10×10µm and fabricated using ten laser pulses. This dynamic image-based machining technique may offer speed advantages over serial-writing procedures, whilst still producing wavelength-scale feature sizes.
1042-346X
1-7
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Heath, D.J.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Feinäugle, M.
5b631cb4-197f-49db-ab27-352cad7ff656
Grant-Jacob, J.A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Heath, D.J.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Feinäugle, M.
5b631cb4-197f-49db-ab27-352cad7ff656
Grant-Jacob, J.A.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Mills, B., Heath, D.J., Feinäugle, M., Grant-Jacob, J.A. and Eason, R.W. (2014) Laser ablation via programmable image projection for submicron dimension machining in diamond. Journal of Laser Applications, 26 (4), 1-7, [41501]. (doi:10.2351/1.4893749).

Record type: Article

Abstract

A digital micromirror device is used as an intensity spatial light modulator, in conjunction with a femtosecond laser, for programmable image-projection-based laser ablation of polycrystalline diamond. Results show the machining of complex structures on the diamond surface, where individual structures have submicron features, covering a total area of 10×10µm and fabricated using ten laser pulses. This dynamic image-based machining technique may offer speed advantages over serial-writing procedures, whilst still producing wavelength-scale feature sizes.

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More information

Accepted/In Press date: 12 August 2014
e-pub ahead of print date: 22 August 2014
Published date: November 2014
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 368440
URI: http://eprints.soton.ac.uk/id/eprint/368440
ISSN: 1042-346X
PURE UUID: 24b77df7-0799-4c3a-bd9a-26622d1134e4
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for J.A. Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 29 Aug 2014 14:56
Last modified: 18 Feb 2021 17:15

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Contributors

Author: B. Mills ORCID iD
Author: D.J. Heath
Author: M. Feinäugle
Author: R.W. Eason ORCID iD

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