The University of Southampton
×
Filter your search:
University of Southampton Institutional Repository

Nanofabrication technologies: high-throughput for tomorrow's metadevices

Nanofabrication technologies: high-throughput for tomorrow's metadevices
Nanofabrication technologies: high-throughput for tomorrow's metadevices
Fabrication fundamentals
1. Serial versus parallel? Most are currently fabricated by serial writing….
2. Additive or subtractive?
3. Feature size required.
4. One-off demonstration (journal paper) or volume production (in the shops by next Christmas…)
5. What material?
6. Cost….(+ normalise to 150mm diameter wafer)
7. Time to fabricate
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, M.
5b631cb4-197f-49db-ab27-352cad7ff656
Heath, D.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Banks, D.P.
9bd095f0-76f8-4ae2-a9a3-29c7990bf70e
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Katis, I.N.
f92dfb8f-610d-4877-83f6-fd26a571df12
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Feinäugle, M.
5b631cb4-197f-49db-ab27-352cad7ff656
Heath, D.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Banks, D.P.
9bd095f0-76f8-4ae2-a9a3-29c7990bf70e
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Katis, I.N.
f92dfb8f-610d-4877-83f6-fd26a571df12

Eason, R.W., Mills, B., Feinäugle, M., Heath, D., Banks, D.P., Sones, C.L., Grant-Jacob, J. and Katis, I.N. (2014) Nanofabrication technologies: high-throughput for tomorrow's metadevices. Metamaterials retreat, Chamonix-Mont-Blanc, France. 17 - 21 Mar 2014.

Record type: Conference or Workshop Item (Paper)

Abstract

Fabrication fundamentals
1. Serial versus parallel? Most are currently fabricated by serial writing….
2. Additive or subtractive?
3. Feature size required.
4. One-off demonstration (journal paper) or volume production (in the shops by next Christmas…)
5. What material?
6. Cost….(+ normalise to 150mm diameter wafer)
7. Time to fabricate

Text
6343.pdf - Other
Download (2MB)

More information

e-pub ahead of print date: 2014
Venue - Dates: Metamaterials retreat, Chamonix-Mont-Blanc, France, 2014-03-17 - 2014-03-21
Organisations: Optoelectronics Research Centre
Learn more about Optoelectronics Research Centre research

Identifiers

Local EPrints ID: 368749
URI: http://eprints.soton.ac.uk/id/eprint/368749
PURE UUID: 92065aeb-5d24-4712-885a-b71514ed18d6
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for J. Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for I.N. Katis: ORCID iD orcid.org/0000-0002-2016-557X

Catalogue record

Date deposited: 11 Sep 2014 12:38
Last modified: 15 Mar 2024 03:50

Export record

Contributors

Author: R.W. Eason ORCID iD
Author: B. Mills ORCID iD
Author: M. Feinäugle
Author: D. Heath
Author: D.P. Banks
Author: C.L. Sones
Author: J. Grant-Jacob ORCID iD
Author: I.N. Katis ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information
Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×