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Top-down polysilicon nanowires by ion beam etching for biosensing applications

Top-down polysilicon nanowires by ion beam etching for biosensing applications
Top-down polysilicon nanowires by ion beam etching for biosensing applications
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Hu, Chunxiao
4892b566-6809-42a8-8285-1c1e93aac730
Thomas, Owain
f9816700-63de-4cbf-a4dd-939ff7607fb5
de Planque, Maurits R.R.
a1d33d13-f516-44fb-8d2c-c51d18bc21ba
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Sun, Kai
b7c648a3-7be8-4613-9d4d-1bf937fb487b
Zeimpekis, Ioannis
a2c354ec-3891-497c-adac-89b3a5d96af0
Hu, Chunxiao
4892b566-6809-42a8-8285-1c1e93aac730
Thomas, Owain
f9816700-63de-4cbf-a4dd-939ff7607fb5
de Planque, Maurits R.R.
a1d33d13-f516-44fb-8d2c-c51d18bc21ba
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Sun, Kai, Zeimpekis, Ioannis, Hu, Chunxiao, Thomas, Owain, de Planque, Maurits R.R., Chong, Harold M.H., Morgan, Hywel and Ashburn, Peter (2014) Top-down polysilicon nanowires by ion beam etching for biosensing applications. Micro and Nano Engineering, Lausanne, Switzerland. 22 - 26 Sep 2014.

Record type: Conference or Workshop Item (Poster)

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More information

Published date: 24 September 2014
Venue - Dates: Micro and Nano Engineering, Lausanne, Switzerland, 2014-09-22 - 2014-09-26
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 371588
URI: http://eprints.soton.ac.uk/id/eprint/371588
PURE UUID: 8f928d70-f31e-41eb-9fe4-5a256bcc34ec
ORCID for Kai Sun: ORCID iD orcid.org/0000-0001-6807-6253
ORCID for Ioannis Zeimpekis: ORCID iD orcid.org/0000-0002-7455-1599
ORCID for Maurits R.R. de Planque: ORCID iD orcid.org/0000-0002-8787-0513
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761
ORCID for Hywel Morgan: ORCID iD orcid.org/0000-0003-4850-5676

Catalogue record

Date deposited: 09 Nov 2014 21:18
Last modified: 15 Jun 2024 01:42

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Contributors

Author: Kai Sun ORCID iD
Author: Chunxiao Hu
Author: Owain Thomas
Author: Maurits R.R. de Planque ORCID iD
Author: Harold M.H. Chong ORCID iD
Author: Hywel Morgan ORCID iD
Author: Peter Ashburn

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