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Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes.
0960-1317
35018
Rouabah, Hamza
524b3cb3-bec6-4224-821b-10fc81a3329d
Park, Benjamin Y
f33651fe-57b1-4ab6-83cf-6bb905d85d42
Zaouk, Rabih B
1fb62fbf-fc6b-4217-8ff8-dc49b855a355
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Madou, Marc J
1f5372dd-a83d-421a-a955-bc8a1b34b8a6
Green, Nicolas G
d9b47269-c426-41fd-a41d-5f4579faa581
Rouabah, Hamza
524b3cb3-bec6-4224-821b-10fc81a3329d
Park, Benjamin Y
f33651fe-57b1-4ab6-83cf-6bb905d85d42
Zaouk, Rabih B
1fb62fbf-fc6b-4217-8ff8-dc49b855a355
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Madou, Marc J
1f5372dd-a83d-421a-a955-bc8a1b34b8a6
Green, Nicolas G
d9b47269-c426-41fd-a41d-5f4579faa581

Rouabah, Hamza, Park, Benjamin Y, Zaouk, Rabih B, Morgan, Hywel, Madou, Marc J and Green, Nicolas G (2011) Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8. Journal of Micromechanics and Microengineering, 21 (3), 35018. (doi:10.1088/0960-1317/21/3/035018).

Record type: Article

Abstract

Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes.

Text
J57_Rouabah_Park_Zaouk_Morgan_Madou_Green_J_Micromechanics_Microengineering_2011.pdf - Other
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More information

Published date: 17 February 2011
Organisations: Electronics & Computer Science

Identifiers

Local EPrints ID: 372426
URI: https://eprints.soton.ac.uk/id/eprint/372426
ISSN: 0960-1317
PURE UUID: 9f552ef9-cb6d-477a-a4e8-8571a88868d4
ORCID for Hywel Morgan: ORCID iD orcid.org/0000-0003-4850-5676
ORCID for Nicolas G Green: ORCID iD orcid.org/0000-0001-9230-4455

Catalogue record

Date deposited: 03 Dec 2014 13:12
Last modified: 29 Aug 2019 00:44

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