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Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films

Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films
Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films
The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (from 0 to 14 at.%) in order to achieve a nanocomposite based films. With an increase of Zr content a broad peak was observed in X-ray diffraction spectra suggesting the presence of nanocrystalline (nc) ZrC phase for the coatings with Zr content higher than 4 at.%. The application of Scherrer formula yielded a grain sizes with a dimension of 1.0–2.2 nm. These results were supported by X-ray photoelectron spectroscopy showing typical charge transfer at Zrsingle bondC nanograins and carbon matrix interface. The nc-ZrC phase was also observed by transmission electron microscopy. The hardness of the coatings was approximately independent of Zr content. However, the Young modulus increased linearly. The residual stress of the coatings was strongly improved by the presence of nc-ZrC phase embedded in the a-C matrix. Finally, the incorporation of H into the matrix led to denser and harder films.
nanocrystalline ZrC, amorphous carbon, xps, ZrC/a-C(:H)
0169-4332
64-72
Escudeiro, A.
b256ff7b-3f46-4b67-9a4b-ddcfe5900b7f
Figueiredo, N.M.
7fc73784-39fe-4c3c-8808-58c264d04889
Polcar, T.
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Cavaleiro, A.
114e42eb-7255-47ef-834d-0546d56d3171
Escudeiro, A.
b256ff7b-3f46-4b67-9a4b-ddcfe5900b7f
Figueiredo, N.M.
7fc73784-39fe-4c3c-8808-58c264d04889
Polcar, T.
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Cavaleiro, A.
114e42eb-7255-47ef-834d-0546d56d3171

Escudeiro, A., Figueiredo, N.M., Polcar, T. and Cavaleiro, A. (2015) Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films. Applied Surface Science, 325, 64-72. (doi:10.1016/j.apsusc.2014.11.015).

Record type: Article

Abstract

The aim of this study was to investigate the effect of Zr as alloying element to carbon films, particularly in respect to film structure and mechanical properties. The films were deposited by magnetron sputtering in reactive (Ar + CH4) and non-reactive (Ar) atmosphere with different Zr contents (from 0 to 14 at.%) in order to achieve a nanocomposite based films. With an increase of Zr content a broad peak was observed in X-ray diffraction spectra suggesting the presence of nanocrystalline (nc) ZrC phase for the coatings with Zr content higher than 4 at.%. The application of Scherrer formula yielded a grain sizes with a dimension of 1.0–2.2 nm. These results were supported by X-ray photoelectron spectroscopy showing typical charge transfer at Zrsingle bondC nanograins and carbon matrix interface. The nc-ZrC phase was also observed by transmission electron microscopy. The hardness of the coatings was approximately independent of Zr content. However, the Young modulus increased linearly. The residual stress of the coatings was strongly improved by the presence of nc-ZrC phase embedded in the a-C matrix. Finally, the incorporation of H into the matrix led to denser and harder films.

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More information

Published date: 15 January 2015
Keywords: nanocrystalline ZrC, amorphous carbon, xps, ZrC/a-C(:H)
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 373892
URI: http://eprints.soton.ac.uk/id/eprint/373892
ISSN: 0169-4332
PURE UUID: 5e01111a-b7ce-46f9-8f58-119e63c9d6d4
ORCID for T. Polcar: ORCID iD orcid.org/0000-0002-0863-6287

Catalogue record

Date deposited: 02 Feb 2015 14:20
Last modified: 15 Mar 2024 03:40

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Contributors

Author: A. Escudeiro
Author: N.M. Figueiredo
Author: T. Polcar ORCID iD
Author: A. Cavaleiro

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