Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD
Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD
Ben Masaud, T.M.
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Tarazona, A.
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Petra, Rafidah
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Mashanovich, Goran Z.
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Reed, G.T.
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Chong, Harold M.H.
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21 June 2015
Ben Masaud, T.M.
4b4264c4-210b-4d14-9e2c-3fb8ccbc5b6b
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Petra, Rafidah
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Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, G.T.
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Chong, Harold M.H.
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Ben Masaud, T.M., Tarazona, A., Petra, Rafidah, Mashanovich, Goran Z., Reed, G.T. and Chong, Harold M.H.
(2015)
Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD.
Conference on Lasers and Electro-Optics.
20 - 24 Jun 2015.
Record type:
Conference or Workshop Item
(Paper)
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Published date: 21 June 2015
Venue - Dates:
Conference on Lasers and Electro-Optics, 2015-06-20 - 2015-06-24
Organisations:
Optoelectronics Research Centre, Electronics & Computer Science
Identifiers
Local EPrints ID: 375683
URI: http://eprints.soton.ac.uk/id/eprint/375683
PURE UUID: 3e045e2a-7de2-489e-823a-8d4ef119b162
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Date deposited: 31 Mar 2015 06:16
Last modified: 29 Oct 2024 02:45
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Contributors
Author:
T.M. Ben Masaud
Author:
A. Tarazona
Author:
Rafidah Petra
Author:
Goran Z. Mashanovich
Author:
G.T. Reed
Author:
Harold M.H. Chong
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