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Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD

Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD
Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD
Ben Masaud, T.M.
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Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Petra, Rafidah
82dc1d3d-9f9e-4cd9-832f-9d7f1a36fcc6
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Ben Masaud, T.M.
4b4264c4-210b-4d14-9e2c-3fb8ccbc5b6b
Tarazona, A.
c6ae87c5-c746-4f89-9ff0-9e7b6874e94f
Petra, Rafidah
82dc1d3d-9f9e-4cd9-832f-9d7f1a36fcc6
Mashanovich, Goran Z.
c806e262-af80-4836-b96f-319425060051
Reed, G.T.
ca08dd60-c072-4d7d-b254-75714d570139
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1

Ben Masaud, T.M., Tarazona, A., Petra, Rafidah, Mashanovich, Goran Z., Reed, G.T. and Chong, Harold M.H. (2015) Effect of deposition temperature on the propagation loss of polysilicon waveguides using hot-wire CVD. Conference on Lasers and Electro-Optics. 21 - 25 Jun 2015.

Record type: Conference or Workshop Item (Paper)

Full text not available from this repository.

More information

Published date: 21 June 2015
Venue - Dates: Conference on Lasers and Electro-Optics, 2015-06-21 - 2015-06-25
Organisations: Optoelectronics Research Centre, Electronics & Computer Science

Identifiers

Local EPrints ID: 375683
URI: https://eprints.soton.ac.uk/id/eprint/375683
PURE UUID: 3e045e2a-7de2-489e-823a-8d4ef119b162
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 31 Mar 2015 06:16
Last modified: 26 Jul 2019 00:33

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