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Fabrication and characterisation of suspended narrow silicon nanowire channel for low-power nano-electro-mechanical (NEM) switch applications

Fabrication and characterisation of suspended narrow silicon nanowire channel for low-power nano-electro-mechanical (NEM) switch applications
Fabrication and characterisation of suspended narrow silicon nanowire channel for low-power nano-electro-mechanical (NEM) switch applications
0167-9317
66-70
Boodhoo, L.
3cb5f3c0-0c1f-4d33-93c4-5c75518e1129
Cruddington, L.
55357a10-eb44-4d1b-8ac7-4023d4b2b33c
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Hasegawa, T.
3c8a194b-8477-428c-9f41-8124daca9bf6
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Boodhoo, L.
3cb5f3c0-0c1f-4d33-93c4-5c75518e1129
Cruddington, L.
55357a10-eb44-4d1b-8ac7-4023d4b2b33c
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Hasegawa, T.
3c8a194b-8477-428c-9f41-8124daca9bf6
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9

Boodhoo, L., Cruddington, L., Chong, Harold M.H., Tsuchiya, Yoshishige, Moktadir, Zakaria, Hasegawa, T. and Mizuta, Hiroshi (2015) Fabrication and characterisation of suspended narrow silicon nanowire channel for low-power nano-electro-mechanical (NEM) switch applications. Microelectronic Engineering, 145, 66-70.

Record type: Article

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Published date: 1 September 2015
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 376011
URI: https://eprints.soton.ac.uk/id/eprint/376011
ISSN: 0167-9317
PURE UUID: 347a5aae-d6f7-4c47-8074-1b45b0a7de73
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 13 Apr 2015 07:12
Last modified: 06 Jun 2018 12:37

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Contributors

Author: L. Boodhoo
Author: L. Cruddington
Author: Harold M.H. Chong ORCID iD
Author: Yoshishige Tsuchiya
Author: Zakaria Moktadir
Author: T. Hasegawa
Author: Hiroshi Mizuta

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