This file 16/4/2015 This data set contains the data used in publication: N. Podoliak, W. H. Ng, W. Stewart, H. Liu, A. J. Kenyon, P. Horak, Development of Indium Phosphide MEMS for tunable optical buffering, 17th International Conference on Transparent Optical Networks (ICTON) 2015, 5-9 July 2015, Budapest, Hungary The file dataset.zip contains the files: figure1a_data.csv: comma-separated table of the Electric field relating to Fig.1(a); columns are x-, y-coordinate, Electric field x, y, z components created by Comsol Multiphysics figure1b_data.csv: comma-separated table of the Electric field relating to Fig.1(b); columns are x-, y-coordinate, Electric field x, y, z components created by Comsol Multiphysics figure2a_data.csv: comma-separated table of the data in Fig.2(a); Force calculations in Comsol Multiphysics, processing in Matlab figure2b_data.csv: comma-separated table of the data in Fig.2(b); Force calculations in Comsol Multiphysics, processing in Matlab fig5b_SEM.png: SEM image used to generate Fig. 5(b)