The University of Southampton
University of Southampton Institutional Repository

Tunable optical buffer based on III-V MEMS design

Tunable optical buffer based on III-V MEMS design
Tunable optical buffer based on III-V MEMS design
We present the design and fabrication of a tunable optical buffer device based on III-V semiconductor platform for telecommunication applications. The device comprises two indium phosphide suspended parallel waveguides with cross sectional dimension of 200 nm by 300 nm, separated by an air gap. The gap between the waveguides was designed to be adjustable by electrostatic force. Our simulation estimated that only 3 V is required to increase the separation distance from 50 nm to 500 nm; this translates to a change in the propagation delay by a factor of 2. The first generation of the suspended waveguide structure for optical buffering was fabricated. The sample was grown on an InP substrate by molecular beam epitaxy. The waveguide pattern is written onto a 300 nm thick InP device layer by electron beam lithography and plasma etching. Electrodes were incorporated into the structure to apply voltages for MEMS actuation.
optical buffer, waveguide, III-V semiconductors, MEMS, MOEMS, optical delay, actuation
Ng, W.H.
8d085a91-7054-4571-986b-4d6723f901ea
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, P.
520489b5-ccc7-4d29-bb30-c1e36436ea03
Liu, H.
2f4354df-09da-483b-90ef-1182d7275095
Stewart, W.J.
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, A.J.
e2e3bbbc-23b6-4c67-832d-9a16abf4aa31
Ng, W.H.
8d085a91-7054-4571-986b-4d6723f901ea
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, P.
520489b5-ccc7-4d29-bb30-c1e36436ea03
Liu, H.
2f4354df-09da-483b-90ef-1182d7275095
Stewart, W.J.
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, A.J.
e2e3bbbc-23b6-4c67-832d-9a16abf4aa31

Ng, W.H., Podoliak, Nina, Horak, P., Liu, H., Stewart, W.J. and Kenyon, A.J. (2015) Tunable optical buffer based on III-V MEMS design. SPIE Photonics West '15, San Francisco, United States. 07 - 12 Feb 2015. 6 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

We present the design and fabrication of a tunable optical buffer device based on III-V semiconductor platform for telecommunication applications. The device comprises two indium phosphide suspended parallel waveguides with cross sectional dimension of 200 nm by 300 nm, separated by an air gap. The gap between the waveguides was designed to be adjustable by electrostatic force. Our simulation estimated that only 3 V is required to increase the separation distance from 50 nm to 500 nm; this translates to a change in the propagation delay by a factor of 2. The first generation of the suspended waveguide structure for optical buffering was fabricated. The sample was grown on an InP substrate by molecular beam epitaxy. The waveguide pattern is written onto a 300 nm thick InP device layer by electron beam lithography and plasma etching. Electrodes were incorporated into the structure to apply voltages for MEMS actuation.

Text
6972.pdf - Accepted Manuscript
Download (1MB)

More information

Published date: February 2015
Additional Information: paper 9375-24
Venue - Dates: SPIE Photonics West '15, San Francisco, United States, 2015-02-07 - 2015-02-12
Keywords: optical buffer, waveguide, III-V semiconductors, MEMS, MOEMS, optical delay, actuation
Organisations: Optoelectronics Research Centre, Quantum, Light & Matter Group

Identifiers

Local EPrints ID: 376883
URI: https://eprints.soton.ac.uk/id/eprint/376883
PURE UUID: d2075614-b291-465c-a7b1-ce7875cb11ae
ORCID for Nina Podoliak: ORCID iD orcid.org/0000-0002-3146-0355
ORCID for P. Horak: ORCID iD orcid.org/0000-0002-8710-8764

Catalogue record

Date deposited: 11 May 2015 11:01
Last modified: 20 Jul 2019 01:03

Export record

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×