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Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared

Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared
Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared
We present a new type of mid-infrared silicon-on-insulator (SOI) waveguide. The waveguide comprises a sub-wavelength lattice of holes acting as lateral cladding while at the same time allowing for the bottom oxide (BOX) removal by etching. The waveguide loss is determined at the wavelength of 3.8 µm for structures before and after being underetched using both vapor phase and liquid hydrofluoric acid (HF). A propagation loss of 3.4 dB/cm was measured for a design with a 300 nm grating period and 150 nm holes after partial removal (560 nm) of BOX by vapor phase HF etching. We also demonstrate an alternative design with 550 nm period and 450 nm holes, which allows a faster and complete removal of the BOX by liquid phase HF etching, yielding the waveguide propagation loss of 3.6 dB/cm.
0146-9592
5661-5664
Soler Penadés, J.
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Alonso-Ramos, C.
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Khokhar, A.Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Nedeljković, M.
b64e21c2-1b95-479d-a35c-3456dff8c796
Boodhoo, L.A.
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Ortega-Moñux, A.
1ddc0007-ad93-424f-909e-1891ebd4973e
Molina-Fernández, I.
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Cheben, P.
9a2e25a5-6aa0-414e-a061-23416efedebc
Mashanovich, G.Z.
c806e262-af80-4836-b96f-319425060051
Soler Penadés, J.
f18f3619-0d71-4547-95fd-dd38c37b7adb
Alonso-Ramos, C.
81ef371b-5744-490d-bdf3-5c840a996901
Khokhar, A.Z.
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Nedeljković, M.
b64e21c2-1b95-479d-a35c-3456dff8c796
Boodhoo, L.A.
3de861fb-137e-487d-bff0-45bbd466a223
Ortega-Moñux, A.
1ddc0007-ad93-424f-909e-1891ebd4973e
Molina-Fernández, I.
9a123b9e-a12a-417e-b35d-f55d589af32b
Cheben, P.
9a2e25a5-6aa0-414e-a061-23416efedebc
Mashanovich, G.Z.
c806e262-af80-4836-b96f-319425060051

Soler Penadés, J., Alonso-Ramos, C., Khokhar, A.Z., Nedeljković, M., Boodhoo, L.A., Ortega-Moñux, A., Molina-Fernández, I., Cheben, P. and Mashanovich, G.Z. (2014) Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared. Optics Letters, 39 (19), 5661-5664. (doi:10.1364/OL.39.005661).

Record type: Article

Abstract

We present a new type of mid-infrared silicon-on-insulator (SOI) waveguide. The waveguide comprises a sub-wavelength lattice of holes acting as lateral cladding while at the same time allowing for the bottom oxide (BOX) removal by etching. The waveguide loss is determined at the wavelength of 3.8 µm for structures before and after being underetched using both vapor phase and liquid hydrofluoric acid (HF). A propagation loss of 3.4 dB/cm was measured for a design with a 300 nm grating period and 150 nm holes after partial removal (560 nm) of BOX by vapor phase HF etching. We also demonstrate an alternative design with 550 nm period and 450 nm holes, which allows a faster and complete removal of the BOX by liquid phase HF etching, yielding the waveguide propagation loss of 3.6 dB/cm.

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Accepted/In Press date: 26 July 2014
e-pub ahead of print date: 29 August 2014
Published date: 25 September 2014
Organisations: Optoelectronics Research Centre, Photonic Systems Circuits & Sensors

Identifiers

Local EPrints ID: 378512
URI: https://eprints.soton.ac.uk/id/eprint/378512
ISSN: 0146-9592
PURE UUID: 0bfa7659-28cf-4574-af41-da4bbd76a28f
ORCID for J. Soler Penadés: ORCID iD orcid.org/0000-0002-1706-8533
ORCID for M. Nedeljković: ORCID iD orcid.org/0000-0002-9170-7911

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Date deposited: 30 Jun 2015 13:44
Last modified: 05 Nov 2019 01:36

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Contributors

Author: C. Alonso-Ramos
Author: A.Z. Khokhar
Author: M. Nedeljković ORCID iD
Author: L.A. Boodhoo
Author: A. Ortega-Moñux
Author: I. Molina-Fernández
Author: P. Cheben

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