Characterisation of cubic boron nitride films at different stages of deposition
Characterisation of cubic boron nitride films at different stages of deposition
Cubic boron nitride (c-BN) films have been prepared by tuned substrate RF magnetron sputtering with different deposition times. The films have been characterised by Fourier Transform Infrared Absorption (FTIR) spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and by Atomic Force Microscopy (AFM) measurements. The results show changes in composition and microstructure of the films with different deposition times that correspond to different growth stages of the BN films. By analysing the AFM images, we believe the BN layer formed at the early stages of deposition have a hillock morphology.
cubic boron nitride, magnetron sputtering, AFM images
89-93
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Lousa, A.
97add33d-9828-4945-9db9-886eca569443
Gimeno, S.
044dfb97-ffc6-4922-ab28-1fc89844f063
October 2000
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Fitzgerald, A.G.
a25c0ee4-638b-47b5-987e-cd8969e29345
Rose, M.J.
bd6c0b8a-1e4e-4ce8-be63-6c0bb1cc59a4
Lousa, A.
97add33d-9828-4945-9db9-886eca569443
Gimeno, S.
044dfb97-ffc6-4922-ab28-1fc89844f063
Jiang, Liudi, Fitzgerald, A.G., Rose, M.J., Lousa, A. and Gimeno, S.
(2000)
Characterisation of cubic boron nitride films at different stages of deposition.
Applied Surface Science, 167 (1-2), .
(doi:10.1016/S0169-4332(00)00514-6).
Abstract
Cubic boron nitride (c-BN) films have been prepared by tuned substrate RF magnetron sputtering with different deposition times. The films have been characterised by Fourier Transform Infrared Absorption (FTIR) spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and by Atomic Force Microscopy (AFM) measurements. The results show changes in composition and microstructure of the films with different deposition times that correspond to different growth stages of the BN films. By analysing the AFM images, we believe the BN layer formed at the early stages of deposition have a hillock morphology.
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Published date: October 2000
Keywords:
cubic boron nitride, magnetron sputtering, AFM images
Organisations:
Engineering Mats & Surface Engineerg Gp
Identifiers
Local EPrints ID: 37945
URI: http://eprints.soton.ac.uk/id/eprint/37945
ISSN: 0169-4332
PURE UUID: be5b33d4-a244-4229-bad2-23d720f61af1
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Date deposited: 26 May 2006
Last modified: 16 Mar 2024 03:47
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Contributors
Author:
A.G. Fitzgerald
Author:
M.J. Rose
Author:
A. Lousa
Author:
S. Gimeno
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