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Characterisation of cubic boron nitride films at different stages of deposition

Jiang, Liudi, Fitzgerald, A.G., Rose, M.J., Lousa, A. and Gimeno, S. (2000) Characterisation of cubic boron nitride films at different stages of deposition Applied Surface Science, 167, (1-2), pp. 89-93. (doi:10.1016/S0169-4332(00)00514-6).

Record type: Article


Cubic boron nitride (c-BN) films have been prepared by tuned substrate RF magnetron sputtering with different deposition times. The films have been characterised by Fourier Transform Infrared Absorption (FTIR) spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and by Atomic Force Microscopy (AFM) measurements. The results show changes in composition and microstructure of the films with different deposition times that correspond to different growth stages of the BN films. By analysing the AFM images, we believe the BN layer formed at the early stages of deposition have a hillock morphology.

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Published date: October 2000
Keywords: cubic boron nitride, magnetron sputtering, AFM images
Organisations: Engineering Mats & Surface Engineerg Gp


Local EPrints ID: 37945
ISSN: 0169-4332
PURE UUID: be5b33d4-a244-4229-bad2-23d720f61af1
ORCID for Liudi Jiang: ORCID iD

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Date deposited: 26 May 2006
Last modified: 17 Jul 2017 15:40

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Author: Liudi Jiang ORCID iD
Author: A.G. Fitzgerald
Author: M.J. Rose
Author: A. Lousa
Author: S. Gimeno

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