The University of Southampton
University of Southampton Institutional Repository

Characterisation of cubic boron nitride films at different stages of deposition

Jiang, Liudi, Fitzgerald, A.G., Rose, M.J., Lousa, A. and Gimeno, S. (2000) Characterisation of cubic boron nitride films at different stages of deposition Applied Surface Science, 167, (1-2), pp. 89-93. (doi:10.1016/S0169-4332(00)00514-6).

Record type: Article

Abstract

Cubic boron nitride (c-BN) films have been prepared by tuned substrate RF magnetron sputtering with different deposition times. The films have been characterised by Fourier Transform Infrared Absorption (FTIR) spectroscopy, X-ray Photoelectron Spectroscopy (XPS) and by Atomic Force Microscopy (AFM) measurements. The results show changes in composition and microstructure of the films with different deposition times that correspond to different growth stages of the BN films. By analysing the AFM images, we believe the BN layer formed at the early stages of deposition have a hillock morphology.

Full text not available from this repository.

More information

Published date: October 2000
Keywords: cubic boron nitride, magnetron sputtering, AFM images
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 37945
URI: http://eprints.soton.ac.uk/id/eprint/37945
ISSN: 0169-4332
PURE UUID: be5b33d4-a244-4229-bad2-23d720f61af1
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 26 May 2006
Last modified: 17 Jul 2017 15:40

Export record

Altmetrics

Contributors

Author: Liudi Jiang ORCID iD
Author: A.G. Fitzgerald
Author: M.J. Rose
Author: A. Lousa
Author: S. Gimeno

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×