Transfer-last suspended graphene fabrication on gold, graphite and silicon nanostructures
Transfer-last suspended graphene fabrication on gold, graphite and silicon nanostructures
While most graphene devices fabricated so far have been by transferring graphene onto flat substrates first, an interesting approach would be to transfer graphene onto patterned substrates to suspend graphene for future graphene nanoelectromechanical device applications. This novel "transfer-last" fabrication is beneficial for reducing possible damage of the suspended graphene caused by subsequent undercutting processes and typical substrate interactions. On the other hand, reduction of contact resistance between graphene and various electrodes, and possible integration with silicon technology are the issues to be investigated. This work focuses on developing the technique to transfer graphene on patterned nanostructures made of gold, nanocrystalline graphite (NCG) and silicon.
Reynolds, J.
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Boodhoo, L.
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Huang, C.C.
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Hewak, D.W.
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Saito, S.
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Tsuchiya, Y.
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Mizuta, H.
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June 2015
Reynolds, J.
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Boodhoo, L.
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Huang, C.C.
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Hewak, D.W.
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Saito, S.
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Tsuchiya, Y.
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Mizuta, H.
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Reynolds, J., Boodhoo, L., Huang, C.C., Hewak, D.W., Saito, S., Tsuchiya, Y. and Mizuta, H.
(2015)
Transfer-last suspended graphene fabrication on gold, graphite and silicon nanostructures.
Graphene week, , Manchester, United Kingdom.
22 - 26 Jun 2015.
1 pp
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
While most graphene devices fabricated so far have been by transferring graphene onto flat substrates first, an interesting approach would be to transfer graphene onto patterned substrates to suspend graphene for future graphene nanoelectromechanical device applications. This novel "transfer-last" fabrication is beneficial for reducing possible damage of the suspended graphene caused by subsequent undercutting processes and typical substrate interactions. On the other hand, reduction of contact resistance between graphene and various electrodes, and possible integration with silicon technology are the issues to be investigated. This work focuses on developing the technique to transfer graphene on patterned nanostructures made of gold, nanocrystalline graphite (NCG) and silicon.
More information
Published date: June 2015
Venue - Dates:
Graphene week, , Manchester, United Kingdom, 2015-06-22 - 2015-06-26
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 379624
URI: http://eprints.soton.ac.uk/id/eprint/379624
PURE UUID: 7acbca67-aec0-409f-b801-622002df01b7
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Date deposited: 30 Jul 2015 13:11
Last modified: 15 Mar 2024 03:23
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Contributors
Author:
J. Reynolds
Author:
L. Boodhoo
Author:
S. Saito
Author:
Y. Tsuchiya
Author:
H. Mizuta
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