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Multi-shot laser ablation and digital micromirror device mask translation for sub-diffraction-limit machining resolution

Multi-shot laser ablation and digital micromirror device mask translation for sub-diffraction-limit machining resolution
Multi-shot laser ablation and digital micromirror device mask translation for sub-diffraction-limit machining resolution
Digital Micromirror Devices (DMDs) can offer rapidly generated, bespoke intensity modulation masks for image-projection-based laser-machining. Recent work has shown repeatable sub-micron feature patterning [1], with proposed applications in the medical sciences and photonics. While DMDs can offer rapid patterning, with ~32kHz switching speeds available [2], they are not yet efficient reflectors at <300nm, thus limiting machining resolution to the diffraction limit at the near-visible wavelengths and above.
Heath, D.J.
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Mills, B.
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Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Feinäugle, M.
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Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Heath, D.J.
d53c269d-90d2-41e6-aa63-a03f8f014d21
Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Feinäugle, M.
5b631cb4-197f-49db-ab27-352cad7ff656
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Heath, D.J., Mills, B., Grant-Jacob, J., Feinäugle, M. and Eason, R.W. (2015) Multi-shot laser ablation and digital micromirror device mask translation for sub-diffraction-limit machining resolution. European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, Germany. 21 - 25 Jun 2015. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

Digital Micromirror Devices (DMDs) can offer rapidly generated, bespoke intensity modulation masks for image-projection-based laser-machining. Recent work has shown repeatable sub-micron feature patterning [1], with proposed applications in the medical sciences and photonics. While DMDs can offer rapid patterning, with ~32kHz switching speeds available [2], they are not yet efficient reflectors at <300nm, thus limiting machining resolution to the diffraction limit at the near-visible wavelengths and above.

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Published date: June 2015
Venue - Dates: European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, Germany, 2015-06-21 - 2015-06-25
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 379627
URI: https://eprints.soton.ac.uk/id/eprint/379627
PURE UUID: 55418171-85e4-44a1-98e6-59efbcc8e96f
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for J. Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 30 Jul 2015 10:46
Last modified: 17 Nov 2018 01:37

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