Micro-mechanical integrated optical structures

Holmes, C., Carpenter, Lewis, Cooper, P.A., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2012) Micro-mechanical integrated optical structures. European Conference on Integrated Optics (ECIO), Sitges Barcelona, Sitges, Spain. 18 - 24 Apr 2012. 2 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The work presented, reports recent developments in the fabrication of micro-mechanical integrated optical components. Combining physical micromachining and direct UV-writing, micro-membranes micro-cantilevers and microbridge structures are fabricated.

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Published date: April 2012

Venue - Dates: European Conference on Integrated Optics (ECIO), Sitges Barcelona, Sitges, Spain, 2012-04-18 - 2012-04-24

Organisations: Optoelectronics Research Centre

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Identifiers

Local EPrints ID: 379732

URI: http://eprints.soton.ac.uk/id/eprint/379732

PURE UUID: 12ddf9b5-2cb6-4bd5-921e-efbd82a7a505

ORCID for C. Holmes:

orcid.org/0000-0001-9021-3760

ORCID for J.C. Gates:

orcid.org/0000-0001-8671-5987

ORCID for P.G.R. Smith:

orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 30 Jul 2015 15:35

Last modified: 15 Mar 2024 03:27

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Contributors

Author: C. Holmes

Author: Lewis Carpenter

Author: P.A. Cooper

Author: Helen Rogers

Author: J.C. Gates

Author: P.G.R. Smith

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