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Micro-mechanical integrated optical structures

Micro-mechanical integrated optical structures
Micro-mechanical integrated optical structures
The work presented, reports recent developments in the fabrication of micro-mechanical integrated optical components. Combining physical micromachining and direct UV-writing, micro-membranes micro-cantilevers and microbridge structures are fabricated.
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Cooper, P.A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Rogers, Helen
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Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, Lewis
0daa548e-0d42-4b06-b914-45bfbec41759
Cooper, P.A.
29354b98-c117-4ace-9ca4-1d3ad531485f
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, C., Carpenter, Lewis, Cooper, P.A., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2012) Micro-mechanical integrated optical structures. European Conference on Integrated Optics (ECIO), Spain. 18 - 20 Apr 2012. 2 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The work presented, reports recent developments in the fabrication of micro-mechanical integrated optical components. Combining physical micromachining and direct UV-writing, micro-membranes micro-cantilevers and microbridge structures are fabricated.

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Published date: April 2012
Venue - Dates: European Conference on Integrated Optics (ECIO), Spain, 2012-04-18 - 2012-04-20
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 379732
URI: https://eprints.soton.ac.uk/id/eprint/379732
PURE UUID: 12ddf9b5-2cb6-4bd5-921e-efbd82a7a505
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 30 Jul 2015 15:35
Last modified: 17 Oct 2019 00:38

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Contributors

Author: C. Holmes ORCID iD
Author: Lewis Carpenter
Author: P.A. Cooper
Author: Helen Rogers
Author: J.C. Gates ORCID iD
Author: P.G.R. Smith ORCID iD

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