The University of Southampton
University of Southampton Institutional Repository

Proximity effect quantification and dose optimisation for high resolution helium ion beam lithography

Proximity effect quantification and dose optimisation for high resolution helium ion beam lithography
Proximity effect quantification and dose optimisation for high resolution helium ion beam lithography
Shi, Xiaoqing
004139e0-0381-40c5-a407-ea9865fd3c7a
Prewett, Philip
6a3a966f-5dd0-43d0-8a51-6a5f78e56b1a
Huq, Ejaz
6ba52b03-395d-4361-96b0-5f0d9d7eb746
Bagnall, Darren M.
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Boden, Stuart A.
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Shi, Xiaoqing
004139e0-0381-40c5-a407-ea9865fd3c7a
Prewett, Philip
6a3a966f-5dd0-43d0-8a51-6a5f78e56b1a
Huq, Ejaz
6ba52b03-395d-4361-96b0-5f0d9d7eb746
Bagnall, Darren M.
5d84abc8-77e5-43f7-97cb-e28533f25ef1
Boden, Stuart A.
83976b65-e90f-42d1-9a01-fe9cfc571bf8

Shi, Xiaoqing, Prewett, Philip, Huq, Ejaz, Bagnall, Darren M. and Boden, Stuart A. (2015) Proximity effect quantification and dose optimisation for high resolution helium ion beam lithography. 41st International Conference on Micro and Nano Engineering (MNE 2015), Netherlands. 21 - 24 Sep 2015. 1 pp . (In Press)

Record type: Conference or Workshop Item (Other)
Text
X.ShiAbstract_PMMA_MNE2015_3-Accepted.pdf - Accepted Manuscript
Download (239kB)

More information

Accepted/In Press date: 24 July 2015
Venue - Dates: 41st International Conference on Micro and Nano Engineering (MNE 2015), Netherlands, 2015-09-21 - 2015-09-24
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 380513
URI: https://eprints.soton.ac.uk/id/eprint/380513
PURE UUID: 6d904d6d-bc5d-4077-b53e-d716ec0c4753
ORCID for Stuart A. Boden: ORCID iD orcid.org/0000-0002-4232-1828

Catalogue record

Date deposited: 11 Sep 2015 11:16
Last modified: 06 Jun 2018 12:43

Export record

Contributors

Author: Xiaoqing Shi
Author: Philip Prewett
Author: Ejaz Huq
Author: Darren M. Bagnall
Author: Stuart A. Boden ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×