Boodhoo, L., Al Khalil, F., Chong, H.M.H., Tsuchiya, Y., Redman-White, W., Hasegawa, T. and Mizuta, H (2015) Novel saw tooth gate for stiction and pull-in voltage controlled ohmic silicon NEMS switch. 41st International Conference on Micro and Nano Engineering (MNE 2015), , Den Haag, Netherlands. 21 - 24 Sep 2015.
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Published date: 21 September 2015
Venue - Dates:
41st International Conference on Micro and Nano Engineering (MNE 2015), , Den Haag, Netherlands, 2015-09-21 - 2015-09-24
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 381140
URI: http://eprints.soton.ac.uk/id/eprint/381140
PURE UUID: b614e513-43f7-494f-8e02-3813bbe85233
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Date deposited: 02 Sep 2015 07:49
Last modified: 23 Feb 2023 02:52
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Contributors
Author:
L. Boodhoo
Author:
F. Al Khalil
Author:
H.M.H. Chong
Author:
Y. Tsuchiya
Author:
W. Redman-White
Author:
T. Hasegawa
Author:
H Mizuta
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