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Novel saw tooth gate for stiction and pull-in voltage controlled ohmic silicon NEMS switch

Novel saw tooth gate for stiction and pull-in voltage controlled ohmic silicon NEMS switch
Novel saw tooth gate for stiction and pull-in voltage controlled ohmic silicon NEMS switch
Boodhoo, L.
3cb5f3c0-0c1f-4d33-93c4-5c75518e1129
Al Khalil, F.
ad343c3d-46c0-468d-9c56-211e7dba9d0f
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Tsuchiya, Y.
5e34980d-9e33-4a73-b3be-e8fe2ca71336
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
Hasegawa, T.
3c8a194b-8477-428c-9f41-8124daca9bf6
Mizuta, H
c1072e0f-9b19-46c9-b3e2-211ccad899a4
Boodhoo, L.
3cb5f3c0-0c1f-4d33-93c4-5c75518e1129
Al Khalil, F.
ad343c3d-46c0-468d-9c56-211e7dba9d0f
Chong, H.M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Tsuchiya, Y.
5e34980d-9e33-4a73-b3be-e8fe2ca71336
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
Hasegawa, T.
3c8a194b-8477-428c-9f41-8124daca9bf6
Mizuta, H
c1072e0f-9b19-46c9-b3e2-211ccad899a4

Boodhoo, L., Al Khalil, F., Chong, H.M.H., Tsuchiya, Y., Redman-White, W., Hasegawa, T. and Mizuta, H (2015) Novel saw tooth gate for stiction and pull-in voltage controlled ohmic silicon NEMS switch. 41st International Conference on Micro and Nano Engineering (MNE 2015), Den Haag, Netherlands. 21 - 24 Sep 2015.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: 21 September 2015
Venue - Dates: 41st International Conference on Micro and Nano Engineering (MNE 2015), Den Haag, Netherlands, 2015-09-21 - 2015-09-24
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 381140
URI: https://eprints.soton.ac.uk/id/eprint/381140
PURE UUID: b614e513-43f7-494f-8e02-3813bbe85233
ORCID for H.M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 02 Sep 2015 07:49
Last modified: 23 Aug 2019 00:33

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Contributors

Author: L. Boodhoo
Author: F. Al Khalil
Author: H.M.H. Chong ORCID iD
Author: Y. Tsuchiya
Author: W. Redman-White
Author: T. Hasegawa
Author: H Mizuta

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