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A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor
A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor
For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values
887-891
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Pu, Suan
49f83b8c-9c14-427f-8de3-44786dace734
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Pu, Suan
49f83b8c-9c14-427f-8de3-44786dace734
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Zhao, Chun, Wood, Graham, Pu, Suan and Kraft, Michael (2015) A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor. Procedia Engineering, 120, 887-891. (doi:10.1016/j.proeng.2015.08.766).

Record type: Article

Abstract

For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values

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e-pub ahead of print date: 11 September 2015
Organisations: Electronics & Computer Science
Learn more about Electronics & Computer Science research

Identifiers

Local EPrints ID: 381539
URI: http://eprints.soton.ac.uk/id/eprint/381539
DOI: doi:10.1016/j.proeng.2015.08.766
PURE UUID: 1e0009cd-5836-4f97-8db5-727ddc06de75

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Date deposited: 09 Oct 2015 10:14
Last modified: 14 Mar 2024 21:17

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Contributors

Author: Chun Zhao
Author: Graham Wood
Author: Suan Pu
Author: Michael Kraft

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