The University of Southampton
University of Southampton Institutional Repository

A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor

A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor
A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor
For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values
887-891
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Pu, Suan
49f83b8c-9c14-427f-8de3-44786dace734
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Pu, Suan
49f83b8c-9c14-427f-8de3-44786dace734
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Zhao, Chun, Wood, Graham, Pu, Suan and Kraft, Michael (2015) A feasibility study for a self-oscillating loop for a three degree-of-freedom coupled MEMS resonator force sensor. Procedia Engineering, 120, 887-891. (doi:10.1016/j.proeng.2015.08.766).

Record type: Article

Abstract

For the first time, we investigate a self-oscillating control loop for a three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor for force sensing applications. This is an important step towards real-time measurements using such a sensor. The simulated results successfully demonstrated that, without any external drive signals, the proposed self-oscillating loop is able to automatically lock to the desired mode frequency for the sensing applications. The amplitude ratios from the simulation showed good agreement with the theoretical values

Text
1-s2.0-S1877705815024297-main.pdf - Accepted Manuscript
Download (1MB)

More information

e-pub ahead of print date: 11 September 2015
Organisations: Electronics & Computer Science

Identifiers

Local EPrints ID: 381539
URI: http://eprints.soton.ac.uk/id/eprint/381539
PURE UUID: 1e0009cd-5836-4f97-8db5-727ddc06de75

Catalogue record

Date deposited: 09 Oct 2015 10:14
Last modified: 14 Mar 2024 21:17

Export record

Altmetrics

Contributors

Author: Chun Zhao
Author: Graham Wood
Author: Suan Pu
Author: Michael Kraft

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×