Atmospheric pressure mode localization coupled resonators force sensor

Montaseri, Mohammad H., Xie, Jianbing, Chang, Honglong, Zhao, Chun, Wood, Graham S. and Kraft, Michael (2015) Atmospheric pressure mode localization coupled resonators force sensor. 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Anchorage, United States. 21 - 25 Jun 2015. (doi:10.1109/TRANSDUCERS.2015.7181140).

Record type: Conference or Workshop Item (Poster)

Abstract

This paper reports on a 3-DoF mode localization resonant sensor experimentally evaluated under atmospheric conditions. It was demonstrated that using amplitude ratio as an output signal, even when the device is operated in air, yields a higher sensitivity compared to frequency variation sensitivity when assuming vacuum conditions.

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More information

Published date: 21 June 2015

Venue - Dates: 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Anchorage, United States, 2015-06-21 - 2015-06-25

Organisations: Nanoelectronics and Nanotechnology