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Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source

Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source
Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source
We report the demonstration of scanning-probe coherent diffractive imaging method (also known as ptychographic CDI) using a compact and partially-coherent gas-discharge plasma source of extreme ultraviolet (EUV) radiation at 17.3nm wavelength. Until now, CDI has been mainly carried out with coherent, high-brightness light sources, such as 3rd generation synchrotrons, X-ray free-electron lasers and high harmonic generation. Here we performed ptychographic lensless imaging of an extended sample using a compact, lab-scale source. The CDI reconstructions were achieved by applying constraint relaxation to the CDI algorithm. Experimental results indicate that our method can handle the low spatial coherence, broadband nature of the EUV illumination as well as the residual background due to visible light emitted by the gas-discharge source. The ability to conduct ptychographic imaging with lab-scale and partially coherent EUV sources is expected to significantly expand the applications of this powerful CDI method.
0146-9592
5574-5577
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Bußmann, Jan
a1d5ea20-bd2a-4a16-aac5-2c8665eac270
Rudolf, Denis
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Bresenitz, Raoul
c5111463-2d57-4919-ad76-78d864999460
Miao, Jianwei
ad0364fc-5612-4050-b6ea-eedbb7b98f72
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Juschkin, Larissa
14157640-798a-4f51-ad7b-412ea6ddccb4
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Bußmann, Jan
a1d5ea20-bd2a-4a16-aac5-2c8665eac270
Rudolf, Denis
9be83a5a-914b-4479-b123-e329a970e8d7
Bresenitz, Raoul
c5111463-2d57-4919-ad76-78d864999460
Miao, Jianwei
ad0364fc-5612-4050-b6ea-eedbb7b98f72
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Juschkin, Larissa
14157640-798a-4f51-ad7b-412ea6ddccb4

Odstrčil, Michal, Bußmann, Jan, Rudolf, Denis, Bresenitz, Raoul, Miao, Jianwei, Brocklesby, William and Juschkin, Larissa (2015) Ptychographic imaging with a compact gas-discharge plasma extreme ultraviolet light source. Optics Letters, 40 (23), 5574-5577. (doi:10.1364/OL.40.005574).

Record type: Article

Abstract

We report the demonstration of scanning-probe coherent diffractive imaging method (also known as ptychographic CDI) using a compact and partially-coherent gas-discharge plasma source of extreme ultraviolet (EUV) radiation at 17.3nm wavelength. Until now, CDI has been mainly carried out with coherent, high-brightness light sources, such as 3rd generation synchrotrons, X-ray free-electron lasers and high harmonic generation. Here we performed ptychographic lensless imaging of an extended sample using a compact, lab-scale source. The CDI reconstructions were achieved by applying constraint relaxation to the CDI algorithm. Experimental results indicate that our method can handle the low spatial coherence, broadband nature of the EUV illumination as well as the residual background due to visible light emitted by the gas-discharge source. The ability to conduct ptychographic imaging with lab-scale and partially coherent EUV sources is expected to significantly expand the applications of this powerful CDI method.

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Accepted/In Press date: 26 October 2015
Published date: 24 November 2015
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 382892
URI: https://eprints.soton.ac.uk/id/eprint/382892
ISSN: 0146-9592
PURE UUID: 790c08d4-f641-4856-afce-bfb78f93d966
ORCID for William Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712

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Date deposited: 07 Dec 2015 10:03
Last modified: 18 Jul 2019 01:22

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