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A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity

A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity
A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity
This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be, for example, a change in stiffness of one resonator. A detailed theoretical investigation revealed that a mode aliasing effect, along with the thermal noise floor of the sensor and the associated electrical system ultimately limit the dynamic range of the sensor. The nonlinearity of the 3DoF sensor was also analyzed theoretically. The 3DoF resonator device was fabricated using a silicon on insulator process. Measurement results from a prototype device agreed well with the predictions of the analytical model. A significant, namely 49 times, improvement in sensitivity to stiffness change was evident from the fabricated 3DoF resonator sensor compared with the existing state-of-the-art 2DoF resonator sensors, while the typical nonlinearity was smaller than ±2% for a wide span of stiffness change. In addition, measurements indicate that a dynamic range of at least 39.1 dB is achievable, which could be further extended by decreasing the noise of the device and the interface electronics.
1057-7157
38-51
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Xie, Jianbing
130942fa-d891-40d0-bcb7-5dc548c56310
Chang, Honglong
5e79fc38-b84c-4e7b-aabe-dae9815cf324
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Xie, Jianbing
130942fa-d891-40d0-bcb7-5dc548c56310
Chang, Honglong
5e79fc38-b84c-4e7b-aabe-dae9815cf324
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e

Zhao, Chun, Wood, Graham, Xie, Jianbing, Chang, Honglong, Pu, Suan-Hui and Kraft, Michael (2015) A three degree-of-freedom weakly coupled resonator sensor with enhanced stiffness sensitivity. Journal of Microelectromechanical Systems, 25 (1), 38-51. (doi:10.1109/JMEMS.2015.2490204).

Record type: Article

Abstract

This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be, for example, a change in stiffness of one resonator. A detailed theoretical investigation revealed that a mode aliasing effect, along with the thermal noise floor of the sensor and the associated electrical system ultimately limit the dynamic range of the sensor. The nonlinearity of the 3DoF sensor was also analyzed theoretically. The 3DoF resonator device was fabricated using a silicon on insulator process. Measurement results from a prototype device agreed well with the predictions of the analytical model. A significant, namely 49 times, improvement in sensitivity to stiffness change was evident from the fabricated 3DoF resonator sensor compared with the existing state-of-the-art 2DoF resonator sensors, while the typical nonlinearity was smaller than ±2% for a wide span of stiffness change. In addition, measurements indicate that a dynamic range of at least 39.1 dB is achievable, which could be further extended by decreasing the noise of the device and the interface electronics.

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More information

Accepted/In Press date: 11 October 2015
Published date: 28 October 2015
Organisations: Nanoelectronics and Nanotechnology, Engineering Science Unit

Identifiers

Local EPrints ID: 385348
URI: http://eprints.soton.ac.uk/id/eprint/385348
ISSN: 1057-7157
PURE UUID: 70ee8c49-8cc3-4d8d-baba-4f9b31b01679
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880

Catalogue record

Date deposited: 14 Jan 2016 08:48
Last modified: 10 Nov 2021 03:53

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Contributors

Author: Chun Zhao
Author: Graham Wood
Author: Jianbing Xie
Author: Honglong Chang
Author: Suan-Hui Pu ORCID iD
Author: Michael Kraft

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