The University of Southampton
University of Southampton Institutional Repository

A high-performance accelerometer with a fifth-order sigma-delta modulator

A high-performance accelerometer with a fifth-order sigma-delta modulator
A high-performance accelerometer with a fifth-order sigma-delta modulator
To verify the effectiveness of a higher order electromechanical sigma–delta modulator (ΣΔM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below 1 µg Hz-1/2, static sensitivity 16 pF g-1 and resonant frequency 325 Hz. FEM analyses are performed to verify these key parameters. The silicon-on-glass sensor is fabricated by deep reactive ion etching (DRIE) and anodic bonding. Compared with a second-order electromechanical ΣΔM, which only uses the sensing element as a loop filter, here it is cascaded with additional electronic integrators to form a fifth-order electromechanical ΣΔM, which leads to better signal to quantization noise ratio (SQNR). This novel approach is analysed and system level simulations are presented. A printed circuit board (PCB) prototype of this high-order ΣΔM loop was built and tested. The experimental data agree well with the simulation results.
0960-1317
S22-S29
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Gollasch, Carsten
71abfea4-4214-4bbe-9c2e-50d54269952f
Redman-White, William
d5376167-c925-460f-8e9c-13bffda8e0bf
Dong, Yufeng
08820198-3144-4e9e-9ae8-3a81d801f3c5
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Gollasch, Carsten
71abfea4-4214-4bbe-9c2e-50d54269952f
Redman-White, William
d5376167-c925-460f-8e9c-13bffda8e0bf

Dong, Yufeng, Kraft, Michael, Gollasch, Carsten and Redman-White, William (2005) A high-performance accelerometer with a fifth-order sigma-delta modulator. Journal of Micromechanics and Microengineering, 15 (7), S22-S29. (doi:10.1088/0960-1317/15/7/004).

Record type: Article

Abstract

To verify the effectiveness of a higher order electromechanical sigma–delta modulator (ΣΔM), a micromachined accelerometer is fabricated. The in-plane sensor with fully differential structure has a mechanical noise floor below 1 µg Hz-1/2, static sensitivity 16 pF g-1 and resonant frequency 325 Hz. FEM analyses are performed to verify these key parameters. The silicon-on-glass sensor is fabricated by deep reactive ion etching (DRIE) and anodic bonding. Compared with a second-order electromechanical ΣΔM, which only uses the sensing element as a loop filter, here it is cascaded with additional electronic integrators to form a fifth-order electromechanical ΣΔM, which leads to better signal to quantization noise ratio (SQNR). This novel approach is analysed and system level simulations are presented. A printed circuit board (PCB) prototype of this high-order ΣΔM loop was built and tested. The experimental data agree well with the simulation results.

Full text not available from this repository.

More information

Published date: 20 June 2005

Identifiers

Local EPrints ID: 38625
URI: https://eprints.soton.ac.uk/id/eprint/38625
ISSN: 0960-1317
PURE UUID: 14670d0f-4cc8-4c02-9162-6b9d01cea511

Catalogue record

Date deposited: 15 Jun 2006
Last modified: 09 Jul 2018 16:31

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×