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Design procedure and fabrication of reproducible silicon vernier devices for high-performance refractive index sensing

Design procedure and fabrication of reproducible silicon vernier devices for high-performance refractive index sensing
Design procedure and fabrication of reproducible silicon vernier devices for high-performance refractive index sensing
In this paper, we propose a generalized procedure for the design of integrated Vernier devices for high performance chemical and biochemical sensing. In particular, we demonstrate the accurate control of the most critical design and fabrication parameters of silicon-on-insulator cascade-coupled racetrack resonators operating in the second regime of the Vernier effect, around 1.55 µm. The experimental implementation of our design strategies has allowed a rigorous and reliable investigation of the influence of racetrack resonator and directional coupler dimensions as well as of waveguide process variability on the operation of Vernier devices. Figures of merit of our Vernier architectures have been measured experimentally, evidencing a high reproducibility and a very good agreement with the theoretical predictions, as also confirmed by relative errors even lower than 1%. Finally, a Vernier gain as high as 30.3, average insertion loss of 2.1 dB and extinction ratio up to 30 dB have been achieved.
integrated waveguide sensors, optical sensing, Vernier effect, silicon
1424-8220
13548-13567
Troia, Benedetto
e90140d1-2449-4ca0-b2d4-aac7a1464c5c
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Nedeljković, Milos
b64e21c2-1b95-479d-a35c-3456dff8c796
Reynolds, Scott
79120bae-f620-433a-9360-71973dbc4222
Hu, Youfang
38fe48b3-1609-4834-ad54-dc823e3a98b3
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Passaro, Vittorio
b6aa081c-aabb-4897-8cc3-6f16a58d3d6d
Troia, Benedetto
e90140d1-2449-4ca0-b2d4-aac7a1464c5c
Khokhar, Ali
2eedd1cc-8ac5-4f8e-be25-930bd3eae396
Nedeljković, Milos
b64e21c2-1b95-479d-a35c-3456dff8c796
Reynolds, Scott
79120bae-f620-433a-9360-71973dbc4222
Hu, Youfang
38fe48b3-1609-4834-ad54-dc823e3a98b3
Mashanovich, Goran
c806e262-af80-4836-b96f-319425060051
Passaro, Vittorio
b6aa081c-aabb-4897-8cc3-6f16a58d3d6d

Troia, Benedetto, Khokhar, Ali, Nedeljković, Milos, Reynolds, Scott, Hu, Youfang, Mashanovich, Goran and Passaro, Vittorio (2015) Design procedure and fabrication of reproducible silicon vernier devices for high-performance refractive index sensing. [in special issue: Silicon Based Optical Sensors] Sensors, 15 (6), 13548-13567. (doi:10.3390/s150613548).

Record type: Article

Abstract

In this paper, we propose a generalized procedure for the design of integrated Vernier devices for high performance chemical and biochemical sensing. In particular, we demonstrate the accurate control of the most critical design and fabrication parameters of silicon-on-insulator cascade-coupled racetrack resonators operating in the second regime of the Vernier effect, around 1.55 µm. The experimental implementation of our design strategies has allowed a rigorous and reliable investigation of the influence of racetrack resonator and directional coupler dimensions as well as of waveguide process variability on the operation of Vernier devices. Figures of merit of our Vernier architectures have been measured experimentally, evidencing a high reproducibility and a very good agreement with the theoretical predictions, as also confirmed by relative errors even lower than 1%. Finally, a Vernier gain as high as 30.3, average insertion loss of 2.1 dB and extinction ratio up to 30 dB have been achieved.

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More information

Accepted/In Press date: 8 June 2015
Published date: 10 June 2015
Keywords: integrated waveguide sensors, optical sensing, Vernier effect, silicon
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 386250
URI: https://eprints.soton.ac.uk/id/eprint/386250
ISSN: 1424-8220
PURE UUID: c32a04f8-9d68-44b1-9bd6-289c82ebac0e
ORCID for Milos Nedeljković: ORCID iD orcid.org/0000-0002-9170-7911

Catalogue record

Date deposited: 26 Jan 2016 15:22
Last modified: 29 Oct 2019 01:37

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