Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source

Rudolf, Denis, Bußmann, Jan, Odstrčil, Michal, Dong, Minjie, Bergmann, Klaus, Danylyuk, Serhiy and Juschkin, Larissa (2015) Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source. Optics Letters, 40 (12), 2818-2821. (doi:10.1364/OL.40.002818).

Abstract

Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.

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