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Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source

Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.
0146-9592
2818-2821
Rudolf, Denis
9be83a5a-914b-4479-b123-e329a970e8d7
Bußmann, Jan
a1d5ea20-bd2a-4a16-aac5-2c8665eac270
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Dong, Minjie
012b0117-6389-4d83-8795-625f8c6209a7
Bergmann, Klaus
ec870579-7eb1-47bd-b919-07e26fc264b0
Danylyuk, Serhiy
10b87022-5625-40ff-b494-2c4bb6fe5a51
Juschkin, Larissa
14157640-798a-4f51-ad7b-412ea6ddccb4
Rudolf, Denis
9be83a5a-914b-4479-b123-e329a970e8d7
Bußmann, Jan
a1d5ea20-bd2a-4a16-aac5-2c8665eac270
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Dong, Minjie
012b0117-6389-4d83-8795-625f8c6209a7
Bergmann, Klaus
ec870579-7eb1-47bd-b919-07e26fc264b0
Danylyuk, Serhiy
10b87022-5625-40ff-b494-2c4bb6fe5a51
Juschkin, Larissa
14157640-798a-4f51-ad7b-412ea6ddccb4

Rudolf, Denis, Bußmann, Jan, Odstrčil, Michal, Dong, Minjie, Bergmann, Klaus, Danylyuk, Serhiy and Juschkin, Larissa (2015) Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source. Optics Letters, 40 (12), 2818-2821. (doi:10.1364/OL.40.002818).

Record type: Article

Abstract

Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.

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More information

Accepted/In Press date: 18 May 2015
Published date: 10 June 2015
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 386332
URI: https://eprints.soton.ac.uk/id/eprint/386332
ISSN: 0146-9592
PURE UUID: 1f20658f-1cf7-4c09-a3e9-4a970cfc9364

Catalogue record

Date deposited: 22 Jan 2016 16:11
Last modified: 19 Nov 2018 17:30

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