The University of Southampton
University of Southampton Institutional Repository

Fractional Talbot lithography with extreme ultraviolet light

Fractional Talbot lithography with extreme ultraviolet light
Fractional Talbot lithography with extreme ultraviolet light
Fractional Talbot effect leads to the possibility to implement patterning of structures with smaller periods than the master mask. This is particularly attractive when using short wavelength illumination in the extreme ultraviolet because of attainable resolution in the sub-100-nm range. In this Letter, we demonstrate the Talbot lithography with the fractional Talbot effect under coherent illumination generated with a capillary discharge Ne-like Ar extreme ultraviolet laser. Various spatial frequency multiplications up to 5x are achieved using a parent grating. This technique allows a fabrication of nanostructures with high-resolution patterns, which is of high interest in many applications such as the manufacturing of plasmonic surfaces and photonic devices.
0146-9592
6969-6972
Kim, Hyun-su
39359bf5-7ed4-4524-ba57-f8ce78468b5a
Li, Wei
ab5e097b-b347-4edf-95dd-2b245edf0f81
Danylyuk, Serhiy
10b87022-5625-40ff-b494-2c4bb6fe5a51
Brocklesby, William S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Marconi, Mario C.
02b0a766-aabe-4965-870b-f075c3efd6ac
Juschkin, Larissa
14157640-798a-4f51-ad7b-412ea6ddccb4
Kim, Hyun-su
39359bf5-7ed4-4524-ba57-f8ce78468b5a
Li, Wei
ab5e097b-b347-4edf-95dd-2b245edf0f81
Danylyuk, Serhiy
10b87022-5625-40ff-b494-2c4bb6fe5a51
Brocklesby, William S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Marconi, Mario C.
02b0a766-aabe-4965-870b-f075c3efd6ac
Juschkin, Larissa
14157640-798a-4f51-ad7b-412ea6ddccb4

Kim, Hyun-su, Li, Wei, Danylyuk, Serhiy, Brocklesby, William S., Marconi, Mario C. and Juschkin, Larissa (2014) Fractional Talbot lithography with extreme ultraviolet light. Optics Letters, 39 (24), 6969-6972. (doi:10.1364/OL.39.006969).

Record type: Article

Abstract

Fractional Talbot effect leads to the possibility to implement patterning of structures with smaller periods than the master mask. This is particularly attractive when using short wavelength illumination in the extreme ultraviolet because of attainable resolution in the sub-100-nm range. In this Letter, we demonstrate the Talbot lithography with the fractional Talbot effect under coherent illumination generated with a capillary discharge Ne-like Ar extreme ultraviolet laser. Various spatial frequency multiplications up to 5x are achieved using a parent grating. This technique allows a fabrication of nanostructures with high-resolution patterns, which is of high interest in many applications such as the manufacturing of plasmonic surfaces and photonic devices.

Full text not available from this repository.

More information

Accepted/In Press date: 5 November 2014
e-pub ahead of print date: 14 November 2014
Published date: 15 December 2014
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 386347
URI: http://eprints.soton.ac.uk/id/eprint/386347
ISSN: 0146-9592
PURE UUID: a8dc34f8-edc7-4515-92b5-76a713f61dc4
ORCID for William S. Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712

Catalogue record

Date deposited: 25 Jan 2016 14:40
Last modified: 12 Nov 2019 02:04

Export record

Altmetrics

Contributors

Author: Hyun-su Kim
Author: Wei Li
Author: Serhiy Danylyuk
Author: Mario C. Marconi
Author: Larissa Juschkin

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×