Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source
Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source
High-harmonic generation (HHG) provides a laboratory-scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to ∼100 μm are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.
1317-1320
Baksh, Peter
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Kim, Hyunsu
39359bf5-7ed4-4524-ba57-f8ce78468b5a
Boden, Stuart
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Frey, Jeremy
ba60c559-c4af-44f1-87e6-ce69819bf23f
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
1 April 2016
Baksh, Peter
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Kim, Hyunsu
39359bf5-7ed4-4524-ba57-f8ce78468b5a
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Frey, Jeremy
ba60c559-c4af-44f1-87e6-ce69819bf23f
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Baksh, Peter, Odstrčil, Michal, Kim, Hyunsu, Boden, Stuart, Frey, Jeremy and Brocklesby, William
(2016)
Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source.
Optics Letters, 41 (7), .
(doi:10.1364/OL.41.001317).
Abstract
High-harmonic generation (HHG) provides a laboratory-scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and x-ray spectral region. Here we demonstrate transmission extreme ultraviolet (EUV) ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm and fields of view up to ∼100 μm are demonstrated. These results demonstrate the potential for wide-field, high-resolution, laboratory-scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.
Text
Submission Wide-field Broadband EUV Transmission Ptychography
- Accepted Manuscript
More information
Accepted/In Press date: 5 February 2016
e-pub ahead of print date: 8 February 2016
Published date: 1 April 2016
Organisations:
Optoelectronics Research Centre, Chemistry, Electronics & Computer Science
Identifiers
Local EPrints ID: 387233
URI: http://eprints.soton.ac.uk/id/eprint/387233
ISSN: 0146-9592
PURE UUID: e4c032ec-f8b9-4593-991a-ac8f1b03be6d
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Date deposited: 16 Feb 2016 16:42
Last modified: 15 Mar 2024 03:21
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Contributors
Author:
Peter Baksh
Author:
Michal Odstrčil
Author:
Hyunsu Kim
Author:
Stuart Boden
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