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Wide-field broadband EUV transmission ptychography using a high harmonic source

Wide-field broadband EUV transmission ptychography using a high harmonic source
Wide-field broadband EUV transmission ptychography using a high harmonic source
High harmonic generation (HHG) provides a laboratory scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and X-ray spectral region. Here we demonstrate transmission EUV ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm, and fields of view up to ~100 µm are demonstrated. These results demonstrate the potential for wide-field, high resolution laboratory scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.
0146-9592
1-5
Baksh, Peter
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Kim, Hyunsu
39359bf5-7ed4-4524-ba57-f8ce78468b5a
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Frey, Jeremy
ba60c559-c4af-44f1-87e6-ce69819bf23f
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Baksh, Peter
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Odstrčil, Michal
b297d3ec-ed42-4709-9f90-7af79d0644c7
Kim, Hyunsu
39359bf5-7ed4-4524-ba57-f8ce78468b5a
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Frey, Jeremy
ba60c559-c4af-44f1-87e6-ce69819bf23f
Brocklesby, William
c53ca2f6-db65-4e19-ad00-eebeb2e6de67

Baksh, Peter, Odstrčil, Michal, Kim, Hyunsu, Boden, Stuart, Frey, Jeremy and Brocklesby, William (2016) Wide-field broadband EUV transmission ptychography using a high harmonic source. Optics Letters, 1-5. (doi:10.1364/OL.41.001317).

Record type: Article

Abstract

High harmonic generation (HHG) provides a laboratory scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and X-ray spectral region. Here we demonstrate transmission EUV ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm, and fields of view up to ~100 µm are demonstrated. These results demonstrate the potential for wide-field, high resolution laboratory scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.

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Submission_Wide-field Broadband EUV Transmission Ptychography_20160123_with_corrections_long.pdf - Accepted Manuscript
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Accepted/In Press date: 5 February 2016
e-pub ahead of print date: 8 February 2016
Published date: 1 April 2016
Organisations: Optoelectronics Research Centre, Chemistry, Electronics & Computer Science

Identifiers

Local EPrints ID: 387233
URI: https://eprints.soton.ac.uk/id/eprint/387233
ISSN: 0146-9592
PURE UUID: e4c032ec-f8b9-4593-991a-ac8f1b03be6d
ORCID for Stuart Boden: ORCID iD orcid.org/0000-0002-4232-1828
ORCID for Jeremy Frey: ORCID iD orcid.org/0000-0003-0842-4302
ORCID for William Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712

Catalogue record

Date deposited: 16 Feb 2016 16:42
Last modified: 15 Jul 2019 20:47

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Contributors

Author: Peter Baksh
Author: Michal Odstrčil
Author: Hyunsu Kim
Author: Stuart Boden ORCID iD
Author: Jeremy Frey ORCID iD

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