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Laser driven table-top coherent EUV source for high resolution diffractive microscopy

Laser driven table-top coherent EUV source for high resolution diffractive microscopy
Laser driven table-top coherent EUV source for high resolution diffractive microscopy
High Harmonic Generation (HHG) is a strongly non-linear process where a high intensity, short pulse laser field is focused into a gas resulting in a spectrum of short wavelength radiation in the extreme ultraviolet (EUV) range generated at harmonic frequencies of the fundamental laser field. The resulting radiation conserves the properties of the driving field. The produced EUV beam has low divergence with lateral coherence comparable with the beam size, which allows tight focusing and achieving high photon flux density of highly coherent EUV radiation. Coherent Diffractive Imaging (CDI) is a microscopy method that allows recovering both amplitude and phasing shift of the exit-wave from sample without the need for any EUV objective lens at the diffraction limited resolution. Results, from our experiment on test samples demonstrate 60nm resolution using far-field scanning CDI method (ptychography) and 2x2mm field of view in the near-field mode. Further, spectral data is presented from analysis of a diffraction pattern of a double slit mask showing the option to use the HHG source as a monochromatic or polychromatic depending on the multilayer focusing optics used
Odstrčil, M.
b297d3ec-ed42-4709-9f90-7af79d0644c7
Baksh, P.D.
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Boden, S.A.
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Frey, J.G.
ba60c559-c4af-44f1-87e6-ce69819bf23f
Odstrčil, M.
b297d3ec-ed42-4709-9f90-7af79d0644c7
Baksh, P.D.
578fea83-9a1c-4dd0-b3f6-66f5552f2344
Boden, S.A.
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Frey, J.G.
ba60c559-c4af-44f1-87e6-ce69819bf23f

Odstrčil, M., Baksh, P.D., Boden, S.A., Brocklesby, W.S. and Frey, J.G. (2015) Laser driven table-top coherent EUV source for high resolution diffractive microscopy. Symposium on Extreme Ultraviolet Lithography, Netherlands. 05 - 07 Oct 2015.

Record type: Conference or Workshop Item (Poster)

Abstract

High Harmonic Generation (HHG) is a strongly non-linear process where a high intensity, short pulse laser field is focused into a gas resulting in a spectrum of short wavelength radiation in the extreme ultraviolet (EUV) range generated at harmonic frequencies of the fundamental laser field. The resulting radiation conserves the properties of the driving field. The produced EUV beam has low divergence with lateral coherence comparable with the beam size, which allows tight focusing and achieving high photon flux density of highly coherent EUV radiation. Coherent Diffractive Imaging (CDI) is a microscopy method that allows recovering both amplitude and phasing shift of the exit-wave from sample without the need for any EUV objective lens at the diffraction limited resolution. Results, from our experiment on test samples demonstrate 60nm resolution using far-field scanning CDI method (ptychography) and 2x2mm field of view in the near-field mode. Further, spectral data is presented from analysis of a diffraction pattern of a double slit mask showing the option to use the HHG source as a monochromatic or polychromatic depending on the multilayer focusing optics used

Full text not available from this repository.

More information

Published date: October 2015
Venue - Dates: Symposium on Extreme Ultraviolet Lithography, Netherlands, 2015-10-05 - 2015-10-07
Organisations: Optoelectronics Research Centre, Chemistry, Electronics & Computer Science

Identifiers

Local EPrints ID: 388034
URI: https://eprints.soton.ac.uk/id/eprint/388034
PURE UUID: f471446e-f2ce-4706-b51e-bf6e671aff2b
ORCID for S.A. Boden: ORCID iD orcid.org/0000-0002-4232-1828
ORCID for W.S. Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712
ORCID for J.G. Frey: ORCID iD orcid.org/0000-0003-0842-4302

Catalogue record

Date deposited: 25 Feb 2016 09:53
Last modified: 30 Nov 2018 01:37

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