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Silver-doped germanium sulphide glass channel waveguides fabricated by chemical vapour deposition and photo-dissolution process

Silver-doped germanium sulphide glass channel waveguides fabricated by chemical vapour deposition and photo-dissolution process
Silver-doped germanium sulphide glass channel waveguides fabricated by chemical vapour deposition and photo-dissolution process
Germanium sulphide glass thin films have been fabricated by chemical vapour deposition directly on commercial glass substrates. Silver (Ag)-doped channel waveguide structures were then prepared in a three step process, first channels were patterned in photo-resist, next a Ag thin film was deposited on the patterned waveguide by thermal evaporation, and finally the silver ions were doped into germanium sulphide glass by a photo-dissolution process. The refractive index of germanium sulphide increased by about 0.02 through the photo-dissolution process. The loss of the channel waveguides measured at 632.8 nm was 0.63±0.05 dB/cm.
germanium sulphide glass, channel waveguides, chemical vapour deposition, Ag photo-dissolution
0040-6090
247-251
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0

Huang, Chung-Che and Hewak, Daniel (2006) Silver-doped germanium sulphide glass channel waveguides fabricated by chemical vapour deposition and photo-dissolution process. Thin Solid Films, 500 (1-2), 247-251. (doi:10.1016/j.tsf.2005.11.024).

Record type: Article

Abstract

Germanium sulphide glass thin films have been fabricated by chemical vapour deposition directly on commercial glass substrates. Silver (Ag)-doped channel waveguide structures were then prepared in a three step process, first channels were patterned in photo-resist, next a Ag thin film was deposited on the patterned waveguide by thermal evaporation, and finally the silver ions were doped into germanium sulphide glass by a photo-dissolution process. The refractive index of germanium sulphide increased by about 0.02 through the photo-dissolution process. The loss of the channel waveguides measured at 632.8 nm was 0.63±0.05 dB/cm.

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Published date: 2006
Keywords: germanium sulphide glass, channel waveguides, chemical vapour deposition, Ag photo-dissolution
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 38954
URI: http://eprints.soton.ac.uk/id/eprint/38954
ISSN: 0040-6090
PURE UUID: 1fba9ea0-7f8c-4b20-b3f0-b15aad5b3138
ORCID for Chung-Che Huang: ORCID iD orcid.org/0000-0003-3471-2463
ORCID for Daniel Hewak: ORCID iD orcid.org/0000-0002-2093-5773

Catalogue record

Date deposited: 13 Jun 2006
Last modified: 02 Jul 2021 01:41

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Contributors

Author: Chung-Che Huang ORCID iD
Author: Daniel Hewak ORCID iD

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