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A silicon structure for electrical characterisation of nanoscale elements

Sazio, P.J.A., Berg, J., See, P., Ford, C.J.B., Lundgren, P., Greenham, N.C., Ginger, D.S., Bengtsson, S. and Chin, S.N. (2001) A silicon structure for electrical characterisation of nanoscale elements At 2001 MRS Spring Meeting. 16 - 20 Apr 2001. 6 pp.

Record type: Conference or Workshop Item (Paper)

Abstract

The problem of mass manufacturing electrode structures suitable for contacting nanoscale elements lies primarily in the difficulty of fabricating a nanometre-scale gap between two electrodes in a well controlled, highly parallel manner. In ULSI circuit production, the gate and substrate in MOSFETs are routinely fabricated with a precise vertical spacing of 3 nm between them.

In this work, we have investigated a number of highly parallel methods for the generation of nanogaps, including reconfiguration of the ubiquitous MOS device structure. The silicon dioxide layer that provides vertical separation and electrical insulation between two regions of silicon (the crystalline substrate and the poly-crystalline gate) gives a leakage current of 1 nA µm. In the future this kind of device has the potential to provide a bolt-on technology for the fabrication of ULSI circuits in which conventional CMOS devices are directly hybridised with functional nanoscale elements.

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More information

e-pub ahead of print date: April 2001
Additional Information: Symposium B: Molecular and Biomolecular Electronics. Paper: B2.3
Venue - Dates: 2001 MRS Spring Meeting, 2001-04-16 - 2001-04-20

Identifiers

Local EPrints ID: 38969
URI: http://eprints.soton.ac.uk/id/eprint/38969
PURE UUID: b600e8a0-6a47-43d0-a0e7-cf0037c595cf
ORCID for P.J.A. Sazio: ORCID iD orcid.org/0000-0002-6506-9266

Catalogue record

Date deposited: 20 Jun 2006
Last modified: 17 Jul 2017 15:38

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Contributors

Author: P.J.A. Sazio ORCID iD
Author: J. Berg
Author: P. See
Author: C.J.B. Ford
Author: P. Lundgren
Author: N.C. Greenham
Author: D.S. Ginger
Author: S. Bengtsson
Author: S.N. Chin

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