Evaluating contact force based on displacement measurement of cantilever beams for MEMS switches and sensor applications
Evaluating contact force based on displacement measurement of cantilever beams for MEMS switches and sensor applications
The low level of contact force, typical <;1mN, used in MEMS switches or relays, is often inferred from computational models based on the design geometry of the device. In this work we propose two methods to measure the contact force. The methods combine experimental measurements of cantilever beam displacement with computational models. Further to this we analyze the contact resistance of the beam in contact with a fixed and compliant surface. The fixed surface is Au coated Si, while the compliant surface is Au coated carbon nanotube surface designed to for electrical contact and low force sensing applications.
cantilevers, contact resistance, displacement measurement, electric resistance measurement, force measurement, force sensors, microsensors, microswitches, MEMS switch, cantilever beam displacement measurement, computational model, contact force evaluation, contact force measurement, contact resistance analysis, electrical contact, geometry, nanotube surface, relay, sensor application, gold coated carbon nanotubes, low force sensing, MEMS switching, electrical resistance measurement force, gold, structural beams
1-4
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Lewis, A.P.
cb547b5e-91cb-40cf-95ee-c765ad508442
Down, M.P.
d9286051-167f-4056-ba84-20bc1608ecb3
November 2015
McBride, J.W.
d9429c29-9361-4747-9ba3-376297cb8770
Lewis, A.P.
cb547b5e-91cb-40cf-95ee-c765ad508442
Down, M.P.
d9286051-167f-4056-ba84-20bc1608ecb3
McBride, J.W., Lewis, A.P. and Down, M.P.
(2015)
Evaluating contact force based on displacement measurement of cantilever beams for MEMS switches and sensor applications.
2015 IEEE SENSORS, Busan, Korea, Republic of.
01 - 04 Nov 2015.
.
(doi:10.1109/icsens.2015.7370480).
Record type:
Conference or Workshop Item
(Paper)
Abstract
The low level of contact force, typical <;1mN, used in MEMS switches or relays, is often inferred from computational models based on the design geometry of the device. In this work we propose two methods to measure the contact force. The methods combine experimental measurements of cantilever beam displacement with computational models. Further to this we analyze the contact resistance of the beam in contact with a fixed and compliant surface. The fixed surface is Au coated Si, while the compliant surface is Au coated carbon nanotube surface designed to for electrical contact and low force sensing applications.
This record has no associated files available for download.
More information
Published date: November 2015
Venue - Dates:
2015 IEEE SENSORS, Busan, Korea, Republic of, 2015-11-01 - 2015-11-04
Keywords:
cantilevers, contact resistance, displacement measurement, electric resistance measurement, force measurement, force sensors, microsensors, microswitches, MEMS switch, cantilever beam displacement measurement, computational model, contact force evaluation, contact force measurement, contact resistance analysis, electrical contact, geometry, nanotube surface, relay, sensor application, gold coated carbon nanotubes, low force sensing, MEMS switching, electrical resistance measurement force, gold, structural beams
Organisations:
Mechatronics
Identifiers
Local EPrints ID: 389715
URI: http://eprints.soton.ac.uk/id/eprint/389715
PURE UUID: fd72834c-bb73-41ad-8774-b53e84f83731
Catalogue record
Date deposited: 11 Mar 2016 16:40
Last modified: 15 Mar 2024 02:39
Export record
Altmetrics
Contributors
Author:
A.P. Lewis
Author:
M.P. Down
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics
