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Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process

Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process
Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process
The change in the mass, achieved with focused ion beam (FIB) milling, of one of a pair of electrostatically-coupled microelectromechanical systems (MEMS) resonators has been detected utilising the mode-localisation effect. It has been demonstrated that the shift in the amplitude ratio of the coupled-resonators at the in-phase mode-frequency, in response to a mass change, is five orders of magnitude greater than the equivalent resonant frequency shift of a single resonator device. The device has been fabricated using a silicon-on-insulator (SOI) based process, which allows for high-yield and stiction-free fabrication. In addition, the design of the resonators has been created to have a larger surface area than previously reported designs, in order to facilitate future biological functionalisation. The mass sensitivity has been compared to current state-of-the-art mode-localised mass sensors and a 5.4 times increase in the amplitude ratio response to a given mass change has been demonstrated for the device in this work.
0167-9317
169-173
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Wood, Graham
61de1458-e7f5-4712-925a-a95bb44580ee
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Sari, Ibrahim
cdcb1265-4a94-4c5a-b8b1-f1ca7e6759d7
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Wood, Graham, Zhao, Chun, Pu, Suan-Hui, Boden, Stuart, Sari, Ibrahim and Kraft, Michael (2016) Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process. [in special issue: Micro/Nano Devices and Systems 2015] Microelectronic Engineering, 159, 169-173. (doi:10.1016/j.mee.2016.03.035).

Record type: Article

Abstract

The change in the mass, achieved with focused ion beam (FIB) milling, of one of a pair of electrostatically-coupled microelectromechanical systems (MEMS) resonators has been detected utilising the mode-localisation effect. It has been demonstrated that the shift in the amplitude ratio of the coupled-resonators at the in-phase mode-frequency, in response to a mass change, is five orders of magnitude greater than the equivalent resonant frequency shift of a single resonator device. The device has been fabricated using a silicon-on-insulator (SOI) based process, which allows for high-yield and stiction-free fabrication. In addition, the design of the resonators has been created to have a larger surface area than previously reported designs, in order to facilitate future biological functionalisation. The mass sensitivity has been compared to current state-of-the-art mode-localised mass sensors and a 5.4 times increase in the amplitude ratio response to a given mass change has been demonstrated for the device in this work.

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More information

Accepted/In Press date: 16 March 2016
e-pub ahead of print date: 25 March 2016
Published date: 15 June 2016
Organisations: Nanoelectronics and Nanotechnology, Engineering Science Unit

Identifiers

Local EPrints ID: 390679
URI: https://eprints.soton.ac.uk/id/eprint/390679
ISSN: 0167-9317
PURE UUID: 6dce532b-f863-457f-9f6e-5393fd0aea74
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880
ORCID for Stuart Boden: ORCID iD orcid.org/0000-0002-4232-1828

Catalogue record

Date deposited: 06 Apr 2016 11:22
Last modified: 15 Aug 2019 00:44

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